2023
DOI: 10.1021/acsaelm.2c01789
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Van Der Waals Metal Contacts for Electronic and Optoelectronic Devices

Abstract: For the fabrication of thin-film electronics, conventional physical vapor deposition (PVD) processes have been widely used to form metal contacts on various thin films. However, the PVD process, involving thermally activated high-energy metal atoms, damages the underlying thin films, severely deteriorating the performance and stability of the device. The van der Waals (vdW) metal-contact approach has recently emerged to avoid this issue. By transferring predeposited metal contacts using vdW interactions, atomi… Show more

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Cited by 3 publications
(1 citation statement)
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“…A glow discharge plasma is formed when a potential difference is applied between the anode and a cathode, placed in a partial vacuum (∼0.1-0.4 Pa) of a given gas. Plasma contains ions, electrons (both of which are charge carriers) and neutral molecules [13][14][15][16][17]. In the case of Ar plasma, the ions are positively charged and move towards the cathode, while electrons (emitted by the cathode) move towards the anode.…”
Section: Introductionmentioning
confidence: 99%
“…A glow discharge plasma is formed when a potential difference is applied between the anode and a cathode, placed in a partial vacuum (∼0.1-0.4 Pa) of a given gas. Plasma contains ions, electrons (both of which are charge carriers) and neutral molecules [13][14][15][16][17]. In the case of Ar plasma, the ions are positively charged and move towards the cathode, while electrons (emitted by the cathode) move towards the anode.…”
Section: Introductionmentioning
confidence: 99%