robots, [3] and biomedical devices, [4] flexible electronic devices have attracted much attention. Some flexible electronic devices can be embedded into clothing or gloves, or be mounted on body, to provide a wearable, functional, and sentient electronic system.Flexible strain sensor is one of the representative flexible electronic devices, which works by using electrical sensors built on flexible substrate with various operation modes of piezoresistive, [2] capacitive, [5] and piezoelectric type. [6] Most efforts of research and development have been focused on exploring new materials [7,8] or developing novel structures [9] to detect strain, temperature, or bimodal signal. The reliability of flexible strain sensor in harsh environments such as at ultralow or high temperatures, however, has so far received few attentions. Traditional bendable or stretchable substrate, such as polyethylene terephthalate (PET), polyimide (PI), polydimethylsiloxane (PDMS), paper, silk, and cotton cannot withstand high temperatures. As a result, there has been few thermally stable flexible strain sensors that can survive at temperatures above 200 °C. Consequently, the application of flexible strain sensors is limited in harsh conditions such as in interstellar probe, polar exploration, and petrochemical, where strain sensing at a high or low temperature is required.
Flexible strain sensors have captured a lot of attention since first beingproposed. Most studies are focused on adopting new materials or developing novel structures to detect strain, temperature, and even to realize multifunction. The reliability of flexible strain sensors in harsh environments such as at low and high temperatures, however, has so far received little attention because traditional bendable or stretchable substrates, including polyethylene terephthalate, polyimide, polydimethylsiloxane, paper, silk, and cotton, cannot withstand high temperature. The poor thermostability limits their potential applications in harsh conditions such as in interstellar probes, polar exploration, petrochemical, and metal smelting. Here, a heat-resisting flexible strain sensor is shown, consists of a BaNb 0.5 Ti 0.5 O 3 film on top of a 4.5 µm thick mica substrate. The device exhibits excellent thermal stability in a wide temperature range from 20 to 773.15 K. Owing to the ultrathin mica substrate and low resistance, the device demonstrates low power consumption (0.96 µW cm −2 ), is lightweight (2.06 g cm −3 ), together with having high stability over 5000 bending cycles. This work opens a path for pressure sensors applying ceramic materials that can be used from an ultralow to a high temperature.