2017
DOI: 10.1038/s41535-017-0069-9
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Van der Waals oxide heteroepitaxy

Abstract: The research field of oxide heteroepitaxy suffers from the characteristics of misfit strain and substrate clamping, hampering the optimization of performance and the gain of fundamental understanding of oxide systems. Recently, there are demonstrations on functional oxides epitaxially fabricated on layered muscovite substrate. In these heterostructures, due to the weak interaction between substrate and film, they show the lattice of films close to bulk with excellent strictive properties, suggesting that these… Show more

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Cited by 145 publications
(95 citation statements)
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“…In addition, the strain in films with different orientations is different, following the trend of σ (111) > σ (110) > σ (001) , which also contributes to the larger ME coupling in (001) nanocomposite films. Recently, flexible substrates have been used to grow functional oxide thin films via Van der Waals epitaxy or transfer . Chu and co‐workers reported the growth of BFO:CFO VANs on a flexible muscovite via van der Waals epitaxy .…”
Section: Functionality Tuning Driven By Strain Defect and Interfacementioning
confidence: 99%
“…In addition, the strain in films with different orientations is different, following the trend of σ (111) > σ (110) > σ (001) , which also contributes to the larger ME coupling in (001) nanocomposite films. Recently, flexible substrates have been used to grow functional oxide thin films via Van der Waals epitaxy or transfer . Chu and co‐workers reported the growth of BFO:CFO VANs on a flexible muscovite via van der Waals epitaxy .…”
Section: Functionality Tuning Driven By Strain Defect and Interfacementioning
confidence: 99%
“…Although metal foils with a thickness of micrometers also seem a selection to bear high temperature, the low chemical stability and the difficulty to be polished to micrometers are still big challenges . Therefore, mica has been widely used as substrate for directly grown functional thin films, especially oxide films that need high growth temperature. For flexible oxide/mica heterostructure, various efforts have been devoted to study their electrical transport, magnetotransport, piezoelectric, and magnetoresistance properties or develop flexible resistive memory, flexible transparent heater, and transparent flexible electrodes .…”
Section: Introductionmentioning
confidence: 99%
“…Key to our design is a thin layer of inorganic mica substrate, ensuring that the FeFET can be processed at high temperature, and is highly flexible yet robust, as demonstrated by the photo of an actual device in the inset of Figure a. In order to facilitate van der Waals epitaxy on top of mica, a thin buffer layer of CoFe 2 O 4 (CFO) was grown first by pulsed laser deposition, after which SrRuO 3 (SRO) gate electrode was grown, followed by the deposition of PZT and ZnO. Since the strong polar state of ferroelectric PZT can be electrically poled by the gate voltage with low coercivity, the accumulation and depletion of charge carriers in the semiconducting ZnO channel between the Pt source and drain can be controlled accordingly, enabling FeFETs with low‐power consumption.…”
Section: Resultsmentioning
confidence: 99%