2017
DOI: 10.3762/bjnano.8.76
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Vapor deposition routes to conformal polymer thin films

Abstract: Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polyme… Show more

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Cited by 60 publications
(52 citation statements)
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“…The iCVD reaction mechanism is initiated by pyrolysis of the initiator to radicalize non-covalent electrons to bond with the vinyl group of the monomer and to grow the polymer thin film through the sequential chain bonding [25,26]. Notably, the initiator TBPO is radicalized through the pyrolysis and polymerized with the vinyl groups of monomers such as V4D4 and PFDMA, resulting in thin film growth.…”
Section: Icvd Process Basicsmentioning
confidence: 99%
“…The iCVD reaction mechanism is initiated by pyrolysis of the initiator to radicalize non-covalent electrons to bond with the vinyl group of the monomer and to grow the polymer thin film through the sequential chain bonding [25,26]. Notably, the initiator TBPO is radicalized through the pyrolysis and polymerized with the vinyl groups of monomers such as V4D4 and PFDMA, resulting in thin film growth.…”
Section: Icvd Process Basicsmentioning
confidence: 99%
“…The deposited film is flexible and can endure a tensile strain of up to 3% and repeated flexing cycles without generating cracks or delamination, rendering the iCVD process suitable for applications in flexible devices. The iCVD polymer film can generate an intact interface with an inorganic barrier layer by filling the nano‐defects and nano‐pores of inorganic layers …”
Section: Icvd For Electronic Devicesmentioning
confidence: 99%
“…As mentioned in the previous section, the possibility to conformally coat complex tridimensional geometries allows the engineering of more advanced drug delivery systems. iCVD has been demonstrated to achieve highly controlled and conformal layers, coating complex 3D geometries . McInnes et al adopted iCVD deposited pH responsive polymers for the encapsulation of nanoporous drug delivery vehicles, that is, drug loaded porous silicon (pSi).…”
Section: Strategies For Drug Encapsulation and Controlled Deliverymentioning
confidence: 99%