1973
DOI: 10.1109/proc.1973.9175
|View full text |Cite
|
Sign up to set email alerts
|

Vapor phase epitaxial materials for LED applications

Abstract: The growth and performance of vapor phase epitaxial W E ) III-V materials and devices for lightdtting diode (LED) and display applications are reviewed. Because of the commercial importance of the GaAsP ternary alloys and Gap, this paper is pri-The 111-V material systems with potential for LED apd Y mncerned with these materials. With the addition of nitrogen plications have recently been reviewed by Archer [ 9 ] . These fabricated using GaAsP and GaP. The W E materials growth tech-doping high-performance * ye… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2

Citation Types

0
4
0

Year Published

1976
1976
2024
2024

Publication Types

Select...
4
3
1

Relationship

0
8

Authors

Journals

citations
Cited by 98 publications
(4 citation statements)
references
References 62 publications
0
4
0
Order By: Relevance
“…(26) to Ruehrwein (27) (and to F. V. Williams, fall, 1960, Syracuse, New York) led to today's most widely used open-tube VPE system (Fig. 2) for the large-scale growth of GaAsl-=P= (x = 0 GaAs, x = 1 GaP) (28)(29)(30)(31). In this process of crystal growth, HC1 is used to transport the column 1II constituents (Ga or In metal), and AsI-~ and PH3 are the source of the As and P for the VPE crystal.…”
Section: Vapor Phase Epitaxy (Vpe)--in 1960 Marinacementioning
confidence: 99%
See 1 more Smart Citation
“…(26) to Ruehrwein (27) (and to F. V. Williams, fall, 1960, Syracuse, New York) led to today's most widely used open-tube VPE system (Fig. 2) for the large-scale growth of GaAsl-=P= (x = 0 GaAs, x = 1 GaP) (28)(29)(30)(31). In this process of crystal growth, HC1 is used to transport the column 1II constituents (Ga or In metal), and AsI-~ and PH3 are the source of the As and P for the VPE crystal.…”
Section: Vapor Phase Epitaxy (Vpe)--in 1960 Marinacementioning
confidence: 99%
“…The details of this process for the growth of GaAs, GaP, and GaAs~-xP~ are described elsewhere [Ref. (28)(29)(30)(31)]. It is worth mentioning, however, that since the AsH~-PHa system of VPE crystal growth is the highest volume, most widely used one in the LED industry, it is under constant study in order to effect improvements in crystal quality, freedom from defects, and improved doping.…”
Section: Vapor Phase Epitaxy (Vpe)--in 1960 Marinacementioning
confidence: 99%
“…• MOCVD (Metal Organic Chemical Vapor Deposition) [13] • MBE (Molecular Beam Epitaxy) [14,15] • PVD (Physical Vapor Deposition) [16] • Solution-based methods (such as spin-coating or inkjet printing) [17] • HVPE (Hydride Vapor-Phase Epitaxy) [18] • PAMBE (Plasma-Assisted Molecular Beam Epitaxy) [19] • MBE-MOVPE hybrid approach [20] • MOCVD [21,22] • MBE [23] • PVD [16] • HVPE [18] • MBE-MOVPE hybrid approach [20] • LPE (Liquid-Phase Epitaxy) [24] • MOCVD [22] • MBE [23] • PVD [16] • Hybrid approaches [20] • MOVPE (Metal Organic Vapor-Phase Epitaxy) [25] • VPE (Vapor-Phase Epitaxy) [26] • MOCVD [13] • MBE [23] • PVD [27] Group-Combination (II, III, V, VI)…”
Section: Introductionmentioning
confidence: 99%
“…GaAs x P 1-x is a ternary III-V semiconductor which has found many uses. Since the early 1970s, it has been widely used to fabricate red, orange, and yellow light emitting diodes [1,2]. It was studied for use as a graded base layer in heterojunction bipolar transistors (HBTs) in the 1990s [3].…”
Section: Introductionmentioning
confidence: 99%