Variable-capacitance micromotor with levitated diamagnetic rotor

Liu, Wu; Chen, W.-Y.; Zhang, W.-P.; Huang, Xiaogang; Zhang, Z.-R.

doi:10.1049/el:20080528

Cited by 36 publications

(13 citation statements)

References 10 publications

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“…However, in most of these devices, the sensing or actuating elements are constrained by a spring like structure, which degrades the overall performance such as sensitivity or output force. In order to overcome this and improve the performance, electromagnetic and electrostatic levitation techniques had been implemented for various applications such as contactless micro motors and gyroscopes [1][2][3][4][5][6][7][8][9]. To date these devices have been mainly circular in shape and capable of levitating and rotating micro objects, but did not have any forward propulsion capability.…”

Section: Introductionmentioning

confidence: 99%

A micro electrostatic linear accelerator based on electromagnetic levitation

Sari

Kraft

2011

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

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This paper presents a novel micro linear accelerator that can levitate and accelerate micro objects. The proposed device first levitates micro objects using electromagnetic induction and then accelerates them along a linear path using electrostatic forces. This is the first time that electromagnetic levitation and electrostatic propulsion techniques are used together to realize a miniaturized linear accelerator. The design enables contactless acceleration and positioning of micro objects on a predefined trajectory. It has been experimentally shown that by using the proposed design, a 1x1mm 2 sized and 7μm thick micro object could be levitated to a maximum height of 82μm and propelled forward continuously at a maximum average forward velocity of 3.6mm/s.

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Section: Introductionmentioning

confidence: 99%

A micro electrostatic linear accelerator based on electromagnetic levitation

Sari

Kraft

2011

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

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“…[126,132] Combining diamagnetic and electric force fields, Kauffmann et al successfully levitated several repulsively charged picolitre droplets, performed in a ∼1 mm 2 adjustable flat magnetic well, which was provided by a centimeter-sized cylindrical permanent magnet structure [128]. The application of the HLMA using the same combination in micro-motors was exhibited by Liu et al [129] and Xu et al [130].…”

Section: Hybrid Levitation Micro-actuatorsmentioning

confidence: 99%

Levitating Micro-Actuators: A Review

et al. 2018

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Through remote forces, levitating micro-actuators completely eliminate mechanical attachment between the stationary and moving parts of a micro-actuator, thus providing a fundamental solution to overcoming the domination of friction over inertial forces at the micro-scale. Eliminating the usual mechanical constraints promises micro-actuators with increased operational capabilities and low dissipation energy. Further reduction of friction and hence dissipation by means of vacuum leads to dramatic increases of performance when compared to mechanically tethered counterparts. In order to efficiently employ the benefits provided by levitation, micro-actuators are classified according to their physical principles as well as by their combinations. Different operating principles, structures, materials and fabrication methods are considered. A detailed analysis of the significant achievements in the technology of micro-optics, micro-magnets and micro-coil fabrication, along with the development of new magnetic materials during recent decades, which has driven the creation of new application domains for levitating micro-actuators is performed.

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“…Diamagnetic levitated rotor. In 2007, SJTU gave the description of a novel diamagnetic micromotor (shown in figure 16) in which the gear-shaped pyrolytic graphite rotor is levitated, rotated and constrained by the combination of static magnetic, electrostatic forces and torques [67]. This micromotor is based on the diamagnetic effect found by Superconducting gyroscope.…”

Section: Magnetic Levitated Gyroscopesmentioning

confidence: 99%

The development of micro-gyroscope technology

Zhang¹,

Chen²,

Li³

et al. 2009

J. Micromech. Microeng.

202

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This review reports an overview and development of micro-gyroscope. The review first presents different types of micro-gyroscopes. Micro-gyroscopes in this review are categorized into Coriolis gyroscope, levitated rotor gyroscope, Sagnac gyroscope, nuclear magnetic resonance (NMR) gyroscope according to the working principle. Different principles, structures, materials, fabrications and control technologies of micro-gyroscopes are analyzed. This review compares different classes of gyroscopes in the aspects such as fabrication method, detection axis, materials, size and so on. Finally, the review evaluates the key technologies on how to improve the precision and anti-jamming ability and to extend the available applications of the gyroscopes in the market and patents as well.

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Variable-capacitance micromotor with levitated diamagnetic rotor

Cited by 36 publications

References 10 publications

A micro electrostatic linear accelerator based on electromagnetic levitation

A micro electrostatic linear accelerator based on electromagnetic levitation

Levitating Micro-Actuators: A Review

The development of micro-gyroscope technology

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