1999
DOI: 10.1111/j.1151-2916.1999.tb01810.x
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Variation of the Oxidation Rate of Silicon Carbide with Water‐Vapor Pressure

Abstract: Chemically vapor deposited silicon carbide (CVD SiC) was oxidized at temperatures of 1000°-1400°C in H 2 O/O 2 gas mixtures with compositions of 10-90 vol% water vapor at a total pressure of 1 atm. Additional experiments were conducted in H 2 O/argon mixtures at a temperature of 1100°C. Experiments were designed to minimize impurity and volatility effects, so that only intrinsic water-vapor effects were observed. The oxidation kinetics increased as the watervapor content increased. The parabolic oxidation rate… Show more

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Cited by 335 publications
(271 citation statements)
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“…Exposing those silicon contained ceramics to oxygen containing atmosphere at high temperature leads to formation of a protective SiO 2 oxidation scale which can sufficiently prevent the further oxidation inwards [1,2]. However, the formed SiO 2 protective scale will be degraded significantly under certain atmospheric vapors as alkali vapor and/or water vapor due to the formation of volatile Si(OH) 4 phase [3]. For example, the oxidation kinetics of SiC ceramics increased with enhanced water vapor content and the oxidation rates were approximately one order of magnitude higher than the one observed in the dry oxygen in the 1200-1400 ℃ temperature range [4].…”
Section: Introductionmentioning
confidence: 99%
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“…Exposing those silicon contained ceramics to oxygen containing atmosphere at high temperature leads to formation of a protective SiO 2 oxidation scale which can sufficiently prevent the further oxidation inwards [1,2]. However, the formed SiO 2 protective scale will be degraded significantly under certain atmospheric vapors as alkali vapor and/or water vapor due to the formation of volatile Si(OH) 4 phase [3]. For example, the oxidation kinetics of SiC ceramics increased with enhanced water vapor content and the oxidation rates were approximately one order of magnitude higher than the one observed in the dry oxygen in the 1200-1400 ℃ temperature range [4].…”
Section: Introductionmentioning
confidence: 99%
“…Concerning the reduction of Al 2 O 3 phase, it was considered as the main source of the Al 4 (Fig. 5).…”
Section: Reaction Mechanismmentioning
confidence: 99%
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