Variations in Micromachined Isolator Geometries for Sensor Performance in Harsh Environments

Bottenfield, Brent; Bond, Arthur; Kranz, Michael; Dean, Robert N.; Adams, Mark L.

doi:10.1109/tcpmt.2019.2947191

Cited by 4 publications

(2 citation statements)

References 24 publications

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“…Therefore, considerable attention should be given to the reliability of MEMS devices. Current research mainly focuses on MEMS sensors like gyroscopes [ 17 ] and accelerometers [ 18 , 19 ]. For environment vibration, an efficient solution is to integrate MEMS with a low-pass filter (LPF), a mass-spring-damper structure, and restrain ambient high-frequency vibration [ 20 ].…”

Section: Introductionmentioning

confidence: 99%

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

et al. 2023

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The Micro-Electro-Mechanical-System (MEMS) micromirror has shown great advantages in Light Detection and Ranging (LiDAR) for autonomous vehicles. The equipment on vehicles is usually exposed to environmental vibration that may degrade or even destroy the flexure of the micromirror for its delicate structure. In this work, a mechanical low-pass filter (LPF) acting as a vibration isolator for a micromirror is proposed. The research starts with the evaluation of vibration influences on the micromirror by theoretical calculation and simulation. The results illustrate that mechanical load concentrates at the slow flexure of the micromirror as it is excited to resonate in second-order mode (named piston mode) in Z-direction vibration. A specific LPF for the micromirror is designed to attenuate the response to high-frequency vibration, especially around piston mode. The material of the LPF is a beryllium-copper alloy, chosen for its outstanding properties of elasticity, ductility, and fatigue resistance. To measure the mechanical load on the micromirror in practical, the on-chip piezoresistive sensor is utilized and a relevant test setup is built to validate the effect of the LPF. Micromirrors with or without the LPF are both tested under 10 g vibration in the Z-direction. The sensor output of the device with the LPF is 35.9 mV in piston mode, while the device without the LPF is 70.42 mV. The attenuation ratio is 0.51. This result demonstrates that the LPF structure can effectively reduce the stress caused by piston mode vibration.

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Section: Introductionmentioning

confidence: 99%

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

et al. 2023

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“…Diveyev et al reported on optimizing a dynamic vibration absorber for a selective resonance mode of a MEMS device [ 6 ]. Bottenfiled et al designed and implemented a microscale vibration isolator for attenuating high-frequency excitation signals beyond a cutoff frequency to artificially reduce the system’s effective quality factor [ 7 ].…”

Section: Introductionmentioning

confidence: 99%

A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression

Ahmed,

Duruaku,

Edalatfar

et al. 2023

Micromachines

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We present a high-performance capacitive accelerometer with a sub-µg noise limit and 1.2 kHz bandwidth for particle acceleration detection applications. The low noise of the accelerometer is achieved through a combination of device design optimization and operation under vacuum to reduce the effects of air damping. Operation under vacuum, however, causes amplification of signals around the resonance region, potentially resulting in incapacitating it through saturation of interface electronics or nonlinearities and even damage. The device has thus been designed with two sets of electrodes for high and low electrostatic coupling efficiency. During normal operation, the open-loop device utilizes its high-sensitivity electrodes to provide the best resolution. When a strong signal near resonance is detected, the electrodes with low sensitivity are used for signal monitoring, while the high-sensitivity electrodes are used to apply feedback signals efficiently. A closed-loop electrostatic feedback control architecture is designed to counteract the large displacements of the proof mass near resonance frequency. Therefore, the ability to reconfigure electrodes lets the device be used in high-sensitivity or high-resiliency modes. Several experiments were conducted with DC and AC excitation at different frequencies to verify the effectiveness of the control strategy. The results showed a ten-fold reduction of displacement at resonance in the closed-loop arrangement compared to the open-loop system with a quality factor of 120.

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An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator

Ran,

Wu,

et al. 2023

2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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Variations in Micromachined Isolator Geometries for Sensor Performance in Harsh Environments

Cited by 4 publications

References 24 publications

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression

An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator

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