Vector Proton Beam Writing System

Polozhii, Hlib E.; Ponomarev, A.G.; Kolinko, S.V.; Rebrov, V.A.

doi:10.46813/2022-139-052

Cited by 2 publications

(5 citation statements)

References 8 publications

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“…Магнітні поля задаються струмом котушок електромагніту, керованим з комп'ютера. Було відпрацьовано протонну літографію як з растрових файлів, так і з векторного формату [11]. На рис.…”

Section: переваги протонної літографії та світовий досвідunclassified

“…9. Електронно-мікроскопічне зображення герба України, отримане растровим (а) та векторним (б) методами [11]. а б Рис.…”

Section: переваги протонної літографії та світовий досвідunclassified

“…10. Збільшені ділянки мікроструктур, отриманих растровим (а) та векторним (б) методами під електронним мікроскопом [11].…”

Section: переваги протонної літографії та світовий досвідunclassified

“…12. Векторні мікроструктури більшого (а) та меншого (б) масштабів того самого шаблону під електронним мікроскопом [11].…”

Section: переваги протонної літографії та світовий досвідunclassified

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Proton beam writing: World experience and prospectives in Ukraine

Polozhii¹,

Ponomarev²,

Kolinko³

et al. 2023

Nucl. Phys. At. Energy

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Proton beam writing is a promising lithography method that is being developed in many countries. This method has significant advantages over other lithography methods, amongst all, there is the absence of the need for prefabricated pattern masks and a high aspect ratio of fabricated structures. Numerous publications demonstrate prospective applications of proton beam writing in different fields related to micro- and nanostructures fabrication. Proton beam writing may be used both for nanoelectronics and three-dimensional microstructures with a high aspect ratio. Work on proton beam writing technology is being conducted at the Institute of Applied Physics of the National Academy of Sciences of Ukraine. Last years there were introduced vector proton beam writing method, an electrostatic blanker system for proton beam distortion, and experiments on proton beam writing on chitosan films were conducted, including the films covered with thin films of metals and metal compounds.

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Section: переваги протонної літографії та світовий досвідunclassified

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Proton beam writing: World experience and prospectives in Ukraine

Polozhii¹,

Ponomarev²,

Kolinko³

et al. 2023

Nucl. Phys. At. Energy

Self Cite

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“…The nuclear scanning microprobe is one of the channels of analytical complexes based on electrostatic accelerators. Currently, the microprobe is widely used for non-destructive microanalysis of samples of various origins [1][2][3][4] and proton-beam writing in the fabrication of high-quality 3D micro-and nanostructures [5][6][7].…”

Section: Introductionmentioning

confidence: 99%

High Resolution Probe-Forming System With Spherical Aberration Correction for Nuclear Microprobe

Ponomarev¹,

Kolinko²,

Polozhii³

et al. 2023

Problems of Atomic Science and Technology

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A probe-forming system based on a separate orthomorphic quadruplet of magnetic quadrupole lenses with a short working distance is considered, allowing the system demagnification to be significantly increased. Three magnetic octupole lenses are used to correct spherical aberrations. The parameters of the octupole corrector are calculated using the matricant method. The focusing properties of the system are determined by means of a probe formation optimization process based on the value of the maximum reduced collimated acceptance. The calculations performed showed the feasibility of such a probe forming system for microanalysis and proton beam writing technique.

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Vector Proton Beam Writing System

Cited by 2 publications

References 8 publications

Proton beam writing: World experience and prospectives in Ukraine

Proton beam writing: World experience and prospectives in Ukraine

High Resolution Probe-Forming System With Spherical Aberration Correction for Nuclear Microprobe

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