“…With a monoenergetic positron beam, the parameter ͑S͒ of positron annihilation can be measured as a function of the incident positron energy ͑E, keV͒, where S is defined as S = N s / N T , and N T and N s are the numbers of annihilation events occurring in the range of 503.8 keVՅ E ␥ Յ 518.2 keV or 510.24 keVՅ E ␥ Յ 511.76 keV, respectively. [8][9][10][11][12] Compared with the S of vacancy-free material, the S of a material may increase when open volume and/or density of vacancy-type defects increase. [8][9][10][11][12] In this article, we have found that the partial pressure of oxygen ͑P O 2 ͒ during cooling after growth, strain-state, and substrate material are very important in manipulating the density, diffusion, and distribution of V O s.…”