Verification of a single-shot high speed aerial chromatic confocal metrology sensor

Prause, Korbinian; Layh, Michael; Pinzer, B; Herkommer, Alois

doi:10.1117/12.2607451

Cited by 3 publications

(4 citation statements)

References 20 publications

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“…In combination with the 4f-system to filter non-focused wavelength components and this spectral analysis unit, a full field areal chromatic confocal measurement is performed. This procedure is the key method for obtaining the height information encoded into the spectral domain without decoding the spectral information into a spatial dimension 22 , 23 …”

Section: Methodsmentioning

confidence: 99%

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Toward areal chromatic confocal metrology

2023

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Chromatic confocal metrology suffers from a limitation in the number of measurement points that can be measured simultaneously in a single frame acquisition. We propose chromatic confocal areal metrology (ChromaCAM), in which the surface height for each point in a 2D grid of measurement spots, generated by a rectangular micro-lens array, is parallely analyzed through the utilization of a pinhole multiplexer unit, an analog optical analysis unit, and postprocessing algorithms. An experiment shows the viability of the simultaneous acquisition of multiple measurement points and the advantages over exisiting areal chromatic confocal approaches. Compared with conventional chromatic confocal metrology, the increase in the acquisition rate is significant and enables one-shot measurements.

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Section: Methodsmentioning

confidence: 99%

“…This procedure is the key method for obtaining the height information encoded into the spectral domain without decoding the spectral information into a spatial dimension. 22,23 To obtain an encoding of the axial depth information into the wavelength domain, a hyperchromatic objective is employed. Figure 2 show the design [Fig.…”

Section: Methodsmentioning

confidence: 99%

Toward areal chromatic confocal metrology

2023

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“…The spectral's first momentum obtained is close to the maximum of the spectral distribution and therefore uniquely correlates with the surface height to be measured. [10][11] [12] 3. METHODS…”

Section: Principlesmentioning

confidence: 99%

Spectral optimization and influence of noise for spectrometer free areal chromatic confocal metrology

Lochbrunner,

Prause,

Büttner

et al. 2024

Photonic Instrumentation Engineering XI

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The spectrometer-free chromatic confocal measurement technique enables 3D surface measurements with just one exposure and without scanning. To reduce the need for a spectrometer for the spectral analysis of the reflected light composition and thus the extraction of the local surface height, an optical spectral analysis unit is used. This unit determines the first momentum of the spectral composition reflected from the surface under probe for a large number of lateral measurement points simultaneously. This work investigates the impact of the spectral composition and light power of the light source on the sensitivity and accuracy of this method. A thorough optimization of the light source will be conducted, demonstrating the impact of various spectral compositions and light source power on the system performance, taking into account the system-related etendue. In addition, the optimization of the spectral transmission filter used in the optical spectral analysis unit and its influence on the accuracy and sensitivity of the system over the entire measurement range is shown.

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“…The sensor design includes two CMOS sensors, an LED and several filters, which leads to various sources which can decisively influence the measuring accuracy. [7][8][9] In particular the dependence on an intensity measurement can have disadvantages in terms of noise, which can affect the accuracy of measurements.…”

Section: Introductionmentioning

confidence: 99%

Advantages and limits of spectrometer free areal chromatic confocal metrology

Buettner,

Prause,

Layh

2024

Photonic Instrumentation Engineering XI

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The spectrometer free areal chromatic confocal metrology (ChromaCAM) is an optical 3D surface measurement technology, which allows a simultaneous measurement of a large array of measuring points within a single exposure. In this work, we investigate the accuracy of a first prototype sensor system utilizing this new singleshot 3D measurement technique. It is found that surface height measurement errors smaller 1µm within a total measurement range of about 1000 µm are achievable. Furthermore, several influential factors are investigated showing the advantages and limits of the presented system. Investigating different surface materials it is found that frame rates up to approximately 800 fps for highly reflecting surfaces and up to 30 fps for ceramics, aluminum, and plastics are achievable.

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Verification of a single-shot high speed aerial chromatic confocal metrology sensor

Cited by 3 publications

References 20 publications

Toward areal chromatic confocal metrology

Toward areal chromatic confocal metrology

Spectral optimization and influence of noise for spectrometer free areal chromatic confocal metrology

Advantages and limits of spectrometer free areal chromatic confocal metrology

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