Versatile femtosecond laser interference patterning applied to high-precision nanostructuring of silicon

Solana, Irene; Chacon-Sanchez, Fernando; Garcia-Lechuga, Mario; Siegel, Jan

doi:10.1016/j.optlastec.2024.111360

Optics & Laser Technology

2024

DOI: 10.1016/j.optlastec.2024.111360

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Versatile femtosecond laser interference patterning applied to high-precision nanostructuring of silicon

Irene Solana,

Fernando Chacon-Sanchez,

Mario Garcia-Lechuga

et al.

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Versatile femtosecond laser interference patterning applied to high-precision nanostructuring of silicon

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References 41 publications

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