1991
DOI: 10.1109/3.89950
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Vertical-cavity surface-emitting lasers: Design, growth, fabrication, characterization

Abstract: We have designed, fabricated, and tested verticalcavity surface-emitting lasers (VCSEL) with diameters ranging from 0.5 pm to >50 pm. The approaches we have taken have produced (not necessarily by us) the smallest, the lowest threshold, the highest quantum efficiency, and the highest modulation speed VCSEL's to date. The four principal sections of this paper-design issues, molecular beam epitaxial growth, fabrication, and lasing characteristics-are written by people who are closely involved in their developmen… Show more

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Cited by 504 publications
(112 citation statements)
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“…Highly controlled light output from microcavity lightemitting diodes ͑LEDs͒ and vertical cavity surface emitting lasers ͑VCSELs͒ is of practical application, 1 while organic microcavities have also successfully supported laser operation. 2 When cooled sufficiently, optimally designed semiconductor microcavities enter a regime of strong coupling in which the exciton resonance mixes sufficiently with the cavity photon mode to form two new polariton modes.…”
mentioning
confidence: 99%
“…Highly controlled light output from microcavity lightemitting diodes ͑LEDs͒ and vertical cavity surface emitting lasers ͑VCSELs͒ is of practical application, 1 while organic microcavities have also successfully supported laser operation. 2 When cooled sufficiently, optimally designed semiconductor microcavities enter a regime of strong coupling in which the exciton resonance mixes sufficiently with the cavity photon mode to form two new polariton modes.…”
mentioning
confidence: 99%
“…When the reflectivity of DBR mirrors is increased to high values approaching almost unity the round trip losses became small and at high excitation the threshold of a stimulated emission can be overpassed. This takes place in the VCSEL and VECSEL (acronyms for vertical cavity surface emitting laser [25][26][27] and vertical external cavity surface emitting laser [28,29]). Those surface emitting lasers differ only by top mirror.…”
Section: Vertical Cavity Surface Emitting Lasersmentioning
confidence: 99%
“…Continuous Wave (CW) operation of a VCSEL was presented in 1989, by Jewell et. al, for a device emitting at 850nm (Jewell et al, 1991). This VCSEL presented two unique features as compared to the previous generation of components.…”
mentioning
confidence: 99%