Vertical comb-drive MEMS mirror with sensing function for phase-shift device

Oda, Kentaro; Takao, Hidekuni; Terao, Kyohei; Suzuki, Takao; Shimokawa, Fusao; Ishimaru, Ichiro; Oohira, Fumikazu

doi:10.1016/j.sna.2012.04.007

Cited by 14 publications

(10 citation statements)

References 22 publications

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“…Microelectromechanical system (MEMS) scanners with large vertical actuation of both the micromirror and microlens have a wide range of applications, including optical pickup [1], multiphoton microscopy [2], Fourier transform spectrometry [3,4], confocal microscopy [5], optical coherence tomography [6], and micro optical diffusion sensing [7][8][9]. MEMS scanners based on electrostatic [2,7,10,11], piezoelectrical [12], and electromagnetic [13] actuation mechanisms can achieve high-speed scanning. For example, Oda et al [11] reported an electrostatic comb-drive MEMS mirror with a sensing function, which achieved a vertical displacement of 3 µm with approximately 40 V. Chen et al [12] demonstrated 145 µm out-of-plane actuation with a 2 kHz resonant frequency using symmetrical eight piezoelectric unimorph driving.…”

Section: Introductionmentioning

confidence: 99%

“…MEMS scanners based on electrostatic [2,7,10,11], piezoelectrical [12], and electromagnetic [13] actuation mechanisms can achieve high-speed scanning. For example, Oda et al [11] reported an electrostatic comb-drive MEMS mirror with a sensing function, which achieved a vertical displacement of 3 µm with approximately 40 V. Chen et al [12] demonstrated 145 µm out-of-plane actuation with a 2 kHz resonant frequency using symmetrical eight piezoelectric unimorph driving. Compared with electrostatic, piezoelectrical, and electromagnetic actuations, an electrothermal MEMS scanner can achieve large displacement (several hundred micrometers) without resonant operation.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement

Hashimoto

Taguchi

2020

Micromachines

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Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibility and potential of a kirigami-inspired electrothermal MEMS scanner, which achieves large vertical displacement by out-of-plane film actuation. The proposed scanner is composed of film materials suitable for electrothermal self-reconfigurable folding and unfolding, and microscale film cuttings are strategically placed to generate large displacement. The freestanding electrothermal kirigami film with a 2 mm diameter and high fill factor is completely fabricated by careful stress control in the MEMS process. A 200 μm vertical displacement with 131 mW and a 20 Hz responsive frequency is experimentally demonstrated as a unique function of electrothermal kirigami film. The proposed design, fabrication process, and experimental test validate the proposed scanner’s feasibility and potential for large-displacement scanning with a high fill factor.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement

Hashimoto

Taguchi

2020

Micromachines

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“…In order to overcome the defects of traditional testing sensors, such as being oversized and low accuracy, high-precision nano-displacement sensors have emerged. Among these, the capacitive sensors have become the first choice of the testing devices, due to their high precision, good sensitivity, and high stability [ 12 , 13 ]. To overcome the drawbacks of limited range of capacitive testing, the capacitive sensors are generally made into offset constant-tooth comb-finger structures to satisfy the range and accuracy demands of nano-positioning [ 14 , 15 ].…”

Section: Introductionmentioning

confidence: 99%

Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor

Chen

Wang

Liu

et al. 2017

Sensors

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Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 µm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system.

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“…Among the MEMS actuators, electrostatic actuation is widely used in micromirror designs. There are many novel MEMS micromirrors that are designed and fabricated, a vertical comb-drive MEMS mirror with sensing function was presented in [10] , and a micromirror with stepped vertical comb drive actuators was designed to enlarge the maximum deflection angle [11] . For the parallel plate actuators, micromirror with sidewall electrodes is proposed [8] to increase the effect area of electrodes.…”

Section: Introductionmentioning

confidence: 99%

Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system

Chen

Sun

et al. 2015

International Journal of Optomechatronics

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This article presents the development and implementation of a robust nonlinear control scheme for a 2-D micromirror-based laser scanning microscope system. The presented control scheme, built around sliding mode control approach and augmented an adaptive algorithm, is proposed to improve the tracking accuracy in presence of cross-axis effect. The closed-loop controlled imaging system is developed through integrating a 2-D micromirror with sidewall electrodes (SW), a laser source, NI field-programmable gate array (FPGA) hardware, the optics, position sensing detector (PSD) and photo detector (PD). The experimental results demonstrated that the proposed scheme is able to achieve accurate tracking of a reference triangular signal. Compared with open-loop control, the scanning performance is significantly improved, and a better 2-D image is obtained using the micromirror with the proposed scheme.

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Vertical comb-drive MEMS mirror with sensing function for phase-shift device

Cited by 14 publications

References 22 publications

Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement

Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement

Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor

Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system

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