2019
DOI: 10.1016/j.sna.2019.111569
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Vertically-stacked MEMS PM2.5 sensor for wearable applications

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Cited by 30 publications
(17 citation statements)
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“…However, W-Air is not able to monitor PM 2.5 . A miniaturized mass sensing based on a micro-electro-mechanical system (MEMS) structure is developed to monitor PM 2.5 [ 30 ]. However, the main criterion of air pollution sensor for stroke risk prevention is to continuously monitor both PM 2.5 and toxic gases, and the measured values should not be influenced by other scents emitted by the user.…”
Section: Wearable Devices For Stroke Risk Predictionmentioning
confidence: 99%
“…However, W-Air is not able to monitor PM 2.5 . A miniaturized mass sensing based on a micro-electro-mechanical system (MEMS) structure is developed to monitor PM 2.5 [ 30 ]. However, the main criterion of air pollution sensor for stroke risk prevention is to continuously monitor both PM 2.5 and toxic gases, and the measured values should not be influenced by other scents emitted by the user.…”
Section: Wearable Devices For Stroke Risk Predictionmentioning
confidence: 99%
“…This way, the PM 1 fraction of silicon dioxide particles with diameters in the range of 0.1–4 µm was measured. In another approach, a VI was combined with an FBAR for PM 2.5 detection [ 19 ]. In this case instead of impact, thermophoresis (TP) was used for sampling monodisperse polystyrene latex beads.…”
Section: Portable Gravimetric Aerosol Monitors With Particle-size Separationmentioning
confidence: 99%
“…In the following paper, we first briefly review and evaluate in Section 2 a selection of recently reported portable gravimetric airborne particle sensors [ 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 ]. In Section 3 , we describe design, fabrication and test of a recently proposed highly sensitive MEMS-based NP sensor containing a µFC with an integrated PMC [ 26 , 27 ].…”
Section: Introductionmentioning
confidence: 99%
“…The frequency response of the coupled MEMS resonators provides information about the shift in amplitude ratio and shift in the resonant frequency of the resonators, which is then correlated directly to the mass of the soot particles accumulated on the resonator surface. The MEMS sensor can provide a direct mass measurement, independent of the particle size as opposed to optical particle counters [41]. Particle density and size variations affect the collection efficiency [42] for the MEMS resonators rather than the actual mass measurement, in distinction to instruments based on light scattering measurements.…”
Section: Mems Impactor Stage and Measurement Electronicsmentioning
confidence: 99%