Very high Q-factor resonators in monocrystalline silicon

Buser, R.A.; Rooij, N. F. de

doi:10.1016/0924-4247(90)85064-b

Cited by 75 publications

(26 citation statements)

References 8 publications

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“…As research in the field of sensors shows, viscid damping at small scales even dominates at very low pressures [10][11][12][13][14]. What complicates the discussion is the fact that at large scale, large oscillator displacements and, if amorphous materials are used, material damping can be significant.…”

Section: Benchmarking Of Resonant Electrodynamic Harvestersmentioning

confidence: 99%

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Approaches for a Fair Comparison and Benchmarking of Electromagnetic Vibration Energy Harvesters

Cepnik¹,

Wallrabe²

2013

Micromachines

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The performance of more than 60 different electromagnetic energy harvesters described in more than 100 publications is benchmarked. The benchmarking is based on earlier published parameters from literature as well as on two novel parameters introduced in this paper. The former allow to compare different harvester conversion principles as well as harvesters of different electrodynamic design principles. The latter consider the impact of ambient and boundary conditions for the most important sub-group, namely the resonant electrodynamic harvesters. The special consideration of how the mechanical damping and the energy conversion effectiveness depend on these conditions enables a fairer benchmarking of this common harvester type. High performing prototypes are identified, and the key parameters are provided for explanation. Finally, beneficial design approaches and the main challenges to maximize the output power are pointed out.

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Section: Benchmarking Of Resonant Electrodynamic Harvestersmentioning

confidence: 99%

“…Our own investigations suggested that the critical point is to avoid momentums from an angle between the beam axis and the fixation line as well as an excentrical mass. A solution is the usage of stress compensated approaches [10,42,43].…”

Section: Implications On Designmentioning

confidence: 99%

Approaches for a Fair Comparison and Benchmarking of Electromagnetic Vibration Energy Harvesters

Cepnik¹,

Wallrabe²

2013

Micromachines

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“…7 were done at different temperatures. [62][63][64][65][66][67][68]3,2,69 Given what is known from electronic and photonic device physics regarding oxidation and reconstruction of the Si surface, it seems clear that the mechanical properties of the smallest NEMS devices will deviate greatly from those in bulk. It may prove quite difficult to achieve ultrahigh Q with such extreme surface-to-volume ratios, if only conventional patterning approaches are utilized.…”

Section: Principal Challenges a Pursuit Of Ultrahigh Qmentioning

confidence: 99%

Nanoelectromechanical Systems

Roukes¹

2005

Microsystems

100

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Nanoelectromechanical systems ͑NEMS͒ are drawing interest from both technical and scientific communities. These are electromechanical systems, much like microelectromechanical systems, mostly operated in their resonant modes with dimensions in the deep submicron. In this size regime, they come with extremely high fundamental resonance frequencies, diminished active masses, and tolerable force constants; the quality ͑Q͒ factors of resonance are in the range Q ϳ 10 3 -10 5 -significantly higher than those of electrical resonant circuits. These attributes collectively make NEMS suitable for a multitude of technological applications such as ultrafast sensors, actuators, and signal processing components. Experimentally, NEMS are expected to open up investigations of phonon mediated mechanical processes and of the quantum behavior of mesoscopic mechanical systems. However, there still exist fundamental and technological challenges to NEMS optimization. In this review we shall provide a balanced introduction to NEMS by discussing the prospects and challenges in this rapidly developing field and outline an exciting emerging application, nanoelectromechanical mass detection.

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“…When air is squeezed in a micro-gap, it exhibits a damping effect that is proportional to the inverse of the air film thickness, a phenomenon known in the literature as squeeze-film damping (SQFD). This phenomenon was first theoretically predicted by Langlois 1 in 1962, and around 30 years later, experimentally proven by Buser and De Rooij, 2,3 and later by JD Zook et al 4 With the evolutional development of MEMS devices in various applications, evaluation of squeezed air film damping was under increasing focus by researchers to provide accurate evaluation of dynamic responses and design efficient control schemes. An interesting type of air containing micro-gaps employed in microsystems is the spacing between two parallel protruded structural elements, one of which acts as a fixed electrode and the other functions as a resonating micro-beam.…”

Section: Introductionmentioning

confidence: 99%

Influence of squeeze-film damping on the dynamic behavior of a curved micro-beam

Ouakad

Al‐Qahtani

Hawwa

2016

Advances in Mechanical Engineering

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A fixed-fixed curved micro-beam resonator under the influence of harmonic electrostatic field is considered. Due to the presence of incompressible fluid between the micro-beams and the electrode, a squeeze-film damping affects the dynamic behavior of the resonator. The combined effect of curved geometry and fluid squeeze-film damping is investigated for micro-beams with concave and convex geometries. A reduced-order model is obtained through the application of Galerkin discretization on a coupled fluid-structure system composed of the nonlinear Euler-Bernoulli beam equation and Burgdorfer's model for the neighboring fluid. The dynamic behavior is assessed by investigating the influence of squeeze-film damping on the linear and nonlinear frequency response and the maximum resonant deflection of curved up and curved down micro-beams.

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Very high Q-factor resonators in monocrystalline silicon

Cited by 75 publications

References 8 publications

Approaches for a Fair Comparison and Benchmarking of Electromagnetic Vibration Energy Harvesters

Approaches for a Fair Comparison and Benchmarking of Electromagnetic Vibration Energy Harvesters

Nanoelectromechanical Systems

Influence of squeeze-film damping on the dynamic behavior of a curved micro-beam

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