Very High Sensitivity Displacement Sensor Based on Resonant Cavities

Etxebarria, V.; Lucas, J.; Feuchtwanger, J.; Sadeghzadeh, Atefeh; Hassanzadegan, Hooman; Garmendia, N.; Portilla, J.

doi:10.1109/jsen.2009.2039752

Cited by 21 publications

(10 citation statements)

References 2 publications

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“…4,5 This technique has two main drawbacks: it is not very cost-effective and it does not support a stand-alone solution of the measurement system. Other approaches require a frequency source and a power spectrum analyzer (PSA) or frequency counters as detector.…”

Section: Introductionmentioning

confidence: 99%

“…It is used to measure a perturbation of the resonance frequency of a resonant cavity presented in Ref. 4, where the change of displacements is characterized in terms of resonant frequency.…”

Section: Introductionmentioning

confidence: 99%

“…Finally, the use of RF principles in displacement detection is also becoming increasingly important. 4,[17][18][19] In this work, particularly, a transducer which translates position variations to changing in resonant frequency is used together with the electronics that converts resonant frequency in DC voltage signal. So, an accurate, integrated and costeffective technique for measuring resonant frequency of RF systems is developed, but also, it is applied to high-precision displacement measurements in order to obtain a complete micro-and nano-positioning sensor.…”

Section: Introductionmentioning

confidence: 99%

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Reliable and integrated technique for determining resonant frequency in radio frequency resonators. Application to a high-precision resonant cavity-based displacement sensor

Jauregui

Asua

Portilla

et al. 2015

Review of Scientific Instruments

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This paper presents a reliable and integrated technique for determining the resonant frequency of radio frequency resonators, which can be of interest for different purposes. The approach uses a heterodyne scheme as phase detector coupled to a voltage-controlled oscillator. The system seeks the oscillator frequency that produces a phase null in the resonator, which corresponds to the resonant frequency. A complete explanation of the technique to determine the resonant frequency is presented and experimentally tested. The method has been applied to a high-precision displacement sensor based on resonant cavity, obtaining a theoretical nanometric precision.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Reliable and integrated technique for determining resonant frequency in radio frequency resonators. Application to a high-precision resonant cavity-based displacement sensor

Jauregui

Asua

Portilla

et al. 2015

Review of Scientific Instruments

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“…In our previous works [13,14] a displacement transducer based on RF resonant cavities was proposed. A prototype sensor using two resonant cavities operating in differential mode was shown and tested.…”

Section: Introductionmentioning

confidence: 99%

“…Figure 1 shows a general scheme of the laboratory prototype sensor made of copper comprising two resonant cavities whose dimensions change in opposite directions as a function of the displacement of a transmission rod. The electromagnetic variations caused by the geometry change of the resonant cavities allow to measure the displacement [13].…”

Section: Introductionmentioning

confidence: 99%

Electronic interface for position sensing using resonant cavities

Asua

Etxebarria

Garcı́a-Arribas

et al. 2013

5th IEEE International Workshop on Advances in Sensors and Interfaces IWASI

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The performance and accuracy of micro-and nanopositioning systems are directly linked to the measurement device used to close the associated control loop. In this work we propose, design, and test an electronic interface for a new position and displacement transducer based on resonant cavities. This type of transducer has been proven to achieve resolutions in the nanometer range when the detection is performed using a laboratory network analyzer. The proposed electronic interface is intended to provide a more affordable and compact solution, while preserving as much as possible the excellent performance of the transducer, thus, turning it into a true standalone positioning sensor. The operation of the interface establishes a self-resonance in the cavities and detects the resonance frequency (which is directly related to the position to be measured) by analyzing the attenuation produced by a low pass filter. The results obtained in a prototype of the interface built with discrete elements show that the obtainable positioning accuracy using this cost-effective solution is about 5 micrometers.

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