Very high stability achievement in MEMS based AC voltage references

Blard, F.; Bounouh, Alexandre; Bélières, Denis; Camon, Henri

doi:10.1109/memsys.2011.5734510

Cited by 12 publications

(3 citation statements)

References 10 publications

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“…After Suhonen, many other researchers started to work on these voltage reference sources to improve their accuracy. Since the fabrication characteristics of MEMS tunable capacitor as the main element of MEMS-based voltage references are very critical, there are several papers which are focused on micromachining process of the MEMS tunable capacitors [2][3][4][5][6][7]. The main purpose of these works is to propose and fabricate new designs of microsized tunable capacitors and show the improvement of obtained MEMS-based voltage references.…”

Section: Introductionmentioning

confidence: 99%

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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The accuracy of physical parameters of a tunable MEMS capacitor, as the major part of MEMS AC voltage reference, is of great importance to achieve an accurate output voltage free of the malfunctioning noise and disturbance. Even though strenuous endeavors are made to fabricate MEMS tunable capacitors with desiderated accurate physical characteristics and ameliorate exactness of physical parameters' values, parametric uncertainties ineluctably emerge in fabrication process attributable to imperfections in micromachining process. First off, this paper considers applying an adaptive sliding mode controller design in the MEMS AC voltage reference source so that it is capable of giving off a well-regulated output voltage in defiance of jumbling parametric uncertainties in the plant dynamics and also aggravating external disturbance imposed on the system. Secondly, it puts an investigatory comparison with the designed model reference adaptive controller and the pole-placement state feedback one into one's prospective. Not only does the tuned adaptive sliding mode controller show remarkable robustness against slow parameter variation and external disturbance being compared to the pole-placement state feedback one, but also it immensely gets robust against the external disturbance in comparison with the conventional adaptive controller. The simulation results are promising.

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Section: Introductionmentioning

confidence: 99%

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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“…A novel fabrication process was proposed to metallize both surfaces of an electrostatically actuated micro-machined moving plate capacitor to be utilized as an AC voltage reference for electrical metrology purposes. Blard et al [2] put forth a great-level of stability of voltage references functioning in AC and established upon the pull-in impact in split-fingers MEMS structures. Bounouh et al [3] developed AC voltage reference ranging from 5 V to 90 V exploiting Epitaxial Silicon On Insulator (SOI) surface micro-machining process.…”

Section: Introductionmentioning

confidence: 99%

Design of a fuzzy PID controller for a MEMS tunable capacitor for noise reduction in a voltage reference source

et al. 2021

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This study presents a conventional Ziegler-Nichols (ZN) Proportional Integral Derivative (PID) controller, having reviewed the mathematical modeling of the Micro Electro Mechanical Systems (MEMS) Tunable Capacitors (TCs), and also proposes a fuzzy PID controller which demonstrates a better tracking performance in the presence of measurement noise, in comparison with conventional ZN-based PID controllers. Referring to importance and impact of this research, the proposed controller takes advantage of fuzzy control properties such as robustness against noise. TCs are responsible for regulating the reference voltage when integrated into Alternating Current (AC) Voltage Reference Sources (VRS). Capacitance regulation for tunable capacitors in VRS is carried out by modulating the distance of a movable plate. A successful modulation depends on maintaining the stability around the pull-in point. This distance regulation can be achieved by the proposed controller which guarantees the tracking performance of the movable plate in moving towards the pull-in point, and remaining in this critical position. The simulation results of the tracking performance and capacitance tuning are very promising, subjected to measurement noise. Article Highlights This article deals with MEMS tunable capacitor dynamics and modeling, considering measurement noise. It designs and applies fuzzy PID control system for regulating MEMS voltage reference output. This paper contributes to robustness increase in pull-in performance of the tunable capacitor.

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“…Other researchers began working on the VRS to ameliorate their preciseness. There are some papers which concentrate on micromachining procedures of MEMS tunable capacitors [2][3][4][5][6][7] because of the importance of the MEMS tunable capacitor fabrication specification as the major component of MEMS VRS. The dominant common target in these pieces is proposal and fabrication of novel schemes of tiny tunable capacitors as well as quality enhancement in the final fabricated MEMS VRS.…”

Section: Introductionmentioning

confidence: 99%

Robust adaptive sliding mode control of a MEMS tunable capacitor based on dead-zone method

2020

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Uncertainty in parameters of a tunable Micro Electro Mechanical System (MEMS) capacitor, as the main component of AC Voltage Reference Source (VRS), is significant to obtain a precise output voltage unaffected by disturbance and noise. Although attempts are done to craft the capacitor with desired physical specification and improve accuracy of parameters, parametric uncertainties transpire in manufacturing due to micro-machining shortcomings. First off, this paper remarks design of a Robust Adaptive Sliding Mode Controller (RASMC) and its application for the MEMS AC VRS for the first time so that it can produce a stable precise regulated output at presence of uncertainties and disturbance. Secondly, it makes a comparison between the proposed novel controller and our previously designed ASMC. The comparison reassures one of robustness at exacerbating conditions in the tunable capacitor dynamics. The novelty is employment of the dead zone-based ASMC to manage parametric uncertainty and disturbance in the MEMS tunable capacitor. It also contributes to adaptive sliding mode control of the dynamics with stiffness and damping coefficients, which are non-slowly-varying time-dependent parameters, approaching dead-zone method. Uncertainty in the plate mass besides bounded time-variant uncertainty in stiffness and damping are considered. These restrictions were not deemed in the previous design.

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Very high stability achievement in MEMS based AC voltage references

Cited by 12 publications

References 10 publications

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Design of a fuzzy PID controller for a MEMS tunable capacitor for noise reduction in a voltage reference source

Robust adaptive sliding mode control of a MEMS tunable capacitor based on dead-zone method

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