2008
DOI: 10.1016/j.sna.2007.10.044
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Via-in-pixel design of truly 2D extendable photodiode detector for medical CT imaging

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Cited by 4 publications
(3 citation statements)
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References 11 publications
(18 reference statements)
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“…A Three dimensional or vertical through the wafer interconnect technology has been developed for the large imaging matrices [11]. The special application in the view is the computed tomography in the field of medical imaging.…”
Section: Through Wafer Interconnectionsmentioning
confidence: 99%
See 1 more Smart Citation
“…A Three dimensional or vertical through the wafer interconnect technology has been developed for the large imaging matrices [11]. The special application in the view is the computed tomography in the field of medical imaging.…”
Section: Through Wafer Interconnectionsmentioning
confidence: 99%
“…The paper introduces properties of the thin detectors and spectroscopic characterization of manufactured detectors. The advanced process technology relies on the process steps to fabricate insulated through wafer interconnections (TWI) or vertical electrodes into the detector bulk [11]. The critical process steps are the ICP-etching, the polysilicon filling of the etched holes and the planarization of the wafer surfaces after the polysilicon deposition.…”
Section: Introductionmentioning
confidence: 99%
“…CT images are also used as basis for planning radiotherapy cancer treatment. CT is also often used to follow the course of cancer treatment to determine how the tumor is responding to treatment [14][15][16]. CT imaging provides both good soft tissue resolution (contrast) as well as high spatial resolution.…”
Section: Introductionmentioning
confidence: 99%