2015
DOI: 10.1049/mnl.2014.0306
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Vibration analysis of an elastically restrained microcantilever beam under electrostatic loading using wavelet‐based finite element method

Abstract: An electro-mechanical analysis of a microcantilever beam considering the effect of size dependence and flexible supports is presented. Both static and dynamic analyses are performed to show the coupled effect of flexible support and electrical voltage on the static and dynamic performance of the microcantilever beam. The wavelet-based finite element method (FEM) is used to derive the elastodynamic model of the microcantilever beam. The energy expressions are derived using couple stress theory, while additional… Show more

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Cited by 4 publications
(2 citation statements)
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“…In Pallay and Towfighian's literature [29], a MEMS-parametric resonator was introduced, which used nonideal supports and electrostatic edge fields to achieve an innovative design of energy-efficient resonators. Bashma et al [36] used the finite element method based on wavelet transform to obtain the influence of nonideal support and edge effect on static attraction voltage and first-order natural frequency of the microcantilever beam. Chuang et al [37] obtained an approximate analytical solution to the pull-in voltage of a microcurled cantilever beam considering the nonideal boundary and edge effect.…”
Section: Introductionmentioning
confidence: 99%
“…In Pallay and Towfighian's literature [29], a MEMS-parametric resonator was introduced, which used nonideal supports and electrostatic edge fields to achieve an innovative design of energy-efficient resonators. Bashma et al [36] used the finite element method based on wavelet transform to obtain the influence of nonideal support and edge effect on static attraction voltage and first-order natural frequency of the microcantilever beam. Chuang et al [37] obtained an approximate analytical solution to the pull-in voltage of a microcurled cantilever beam considering the nonideal boundary and edge effect.…”
Section: Introductionmentioning
confidence: 99%
“…They could be designed as sensing structures where the variation in capacitance represents different external physical parameters; examples include humidity sensors [1], vibration sensors [2], strain sensors [3], pressure sensors [4], gyroscopes [5] and accelerometers [6]. On the other hand, electrostatic actuators also include time‐variant capacitors, which are the key components in many applications such as resonators [7, 8], micro mirrors [8], series switches [9], compliant structures [10] and RF devices [11, 12].…”
Section: Introductionmentioning
confidence: 99%