Vibration Analysis of Different Micro-Beams with Laser Ablation

Abstract

The dynamic response of different micro-beams after laser excitation experiments have been investigated in this paper. The impact force that induces the vibration of micro-beams is the interaction of focused pulse laser and tested beams. The impact response of micro-beams after being excited is measured by Laser Doppler Vibrometer. Different beams such as cantilever beam, L-shaped beam are employed in our experiments. Comparisons of the vibration velocity and its frequencies of different beams have also been performed. Experimental results show that the mechanical effects of laser shock do really exist and can be utilized.