2013
DOI: 10.5772/56752
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Vibration Control of Flexible Mode for a Beam-Type Substrate Transport Robot

Abstract: Beam‐type substrate transport robots are widely used to handle substrates, especially in the solar cell manufacturing process. To reduce the takt time and increase productivity, accurate position control becomes increasingly important as the size of the substrate increases. However, the vibration caused by the flexible forks in beam‐type robots interferes with accurate positioning, which results in long takt times in the manufacturing process. To minimize the vibration and transport substrates on the fork as f… Show more

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Cited by 11 publications
(7 citation statements)
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“…본 연구팀에서도 5.5G 솔라셀 기판 핸들링 로봇 에 대한 진동 분석을 위해 유연체를 포함한 로봇의 모델링과 해석 을 위한 연구를 수행해온 바 있다 [5][6][7][8] . 또한 잔류 진동 억제를 위한 제어 알고리즘으로 잘 알려진 입력 명령 성형 기법에 관한 연구도 다수 수행된 바 있다 [9][10][11] .…”
Section: Issn 2508-5107(online) / Issn 2508-5093(print)unclassified
“…본 연구팀에서도 5.5G 솔라셀 기판 핸들링 로봇 에 대한 진동 분석을 위해 유연체를 포함한 로봇의 모델링과 해석 을 위한 연구를 수행해온 바 있다 [5][6][7][8] . 또한 잔류 진동 억제를 위한 제어 알고리즘으로 잘 알려진 입력 명령 성형 기법에 관한 연구도 다수 수행된 바 있다 [9][10][11] .…”
Section: Issn 2508-5107(online) / Issn 2508-5093(print)unclassified
“…Why they have imposed today these models of robots (after tens of years of diversity was the word of order); may and of the need for standardization (Martińez, 2013), or to find a common solution, after a huge portion (however are not yet the only robots use of category serial, but they also have the widest spread) (Park, 2013).…”
Section: Robotsmentioning
confidence: 99%
“…Cartesian coordinate robot is a common structure of industrial robots, which has been widely applied in handling operation, surface mount technology (SMT), welding operation and CNC machine (Park et al, 2013;Wu and Zhang, 2014;Srinivasan et al, 2015;Qian et al, 2016). With the development of modern machinery equipment to integration and lightweight, the flexible Cartesian robotic manipulator (FCRM) has received increasing attention.…”
Section: Introductionmentioning
confidence: 99%
“…By multiple scales method, Chen and Yang (2005) investigated the dynamic stability problems of an axially accelerating beam under the conditions of combination and principal parametric resonance. Similarly, with an added mass placed at an intermediate position, Pratiher and Bhowmick (2011) investigated the nonlinear dynamic characteristics of a Cartesian manipulator. De Luca and Siciliano (1991) analyzed the influences of the payload on the first-order mode shapes of the link-1 and link-2 for a planar multilink lightweight robot, but this research did not further study the impact of the payload on the system dynamics stability.…”
Section: Introductionmentioning
confidence: 99%