Videometrics-based Detection of Vibration Linearity in MEMS Gyroscope

Yong, Zhou; Sun, Haigang; Gao, Shiqiao; Niu, Shaohua

doi:10.1080/18756891.2011.9727789

Cited by 1 publication

(1 citation statement)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Excitation Design for Linearity Measuring. In general test, vibration response of micro-gyroscope to excitation voltage is specified and multiple groups of data about excitation voltage and vibration amplitude should be obtained and fitted to measure the linearity of response [6]. Besides, the vibration response, determined by high precise sensitivity of micro-gyroscope, is easily influenced by outer factors.…”

Section: Measuring and Analysis Of Linearitymentioning

confidence: 99%

Sensitivity and Linearity Measuring of Micro-Gyroscope Based on Dynamic Analysis

Sun

Yong

2013

AMM

View full text Add to dashboard Cite

The operating performance of micro-gyroscope may be easily influenced by various factors, which changes the dynamic response accordingly. Generally, the influences can’t be quantified because of the complexity, and the accurate sensitivity and linearity measuring of micro-gyroscope meets enormous difficulties. In order to accomplish corresponding measuring and analysis accurately and efficiently, input excitation waves are designed based on mathematical analysis of the measuring principles and vibration response, and each measuring of sensitivity and linearity can be analyzed in a single test. In this way, the influences from manual operation and variation of measuring environment are well eliminated, and some key parameters of the dynamic response are obtained, such as sensitive voltage, response function, linearity error, etc. In addition, problems about imbalance in double drive vibration, design of the minimum excitation voltage and evaluation of the measuring error are also described. Therefore, some important references are provided for subsequent design, experiment and engineering application.

show abstract

Section: Measuring and Analysis Of Linearitymentioning

confidence: 99%