Virtual sensing and virtual metrology for spatial error monitoring of roll-to-roll manufacturing systems

Jin, Xiaoning; Shui, Huanyi; Shpitalni, M.

doi:10.1016/j.cirp.2019.04.108

Cited by 8 publications

(1 citation statement)

References 24 publications

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“…Lastly, it was found that since 2015, the scientific focus on CMP and more marginally represented semiconductor applications has grown significantly, such as copper-clad laminate (Kim et al 2017), physical vapour deposition (Chen et al 2020), laser chip manufacturing (Hou et al 2019), roll-to-roll manufacturing (Jin, Shui, and Shpitalni 2019;Shui, Jin, and Ni 2019), and wafer sawing (Hsieh et al 2020) among others. This clearly emphasises the future opportunities for VM in new, less studied semiconductor applications.…”

Section: Semiconductor Manufacturingmentioning

confidence: 99%

Virtual metrology as an approach for product quality estimation in Industry 4.0: a systematic review and integrative conceptual framework

Dreyfus

Psarommatis

May

et al. 2021

International Journal of Production Research

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Virtual metrology (VM) involves estimating a product's quality directly from production process data without physically measuring it. This enables the product quality of each unit of production to be monitored in real time, while preserving the process efficiency. Initially developed for the semiconductor industry, VM has recently been examined for use in other industrial fields. VM is enabled by components such as quality estimators and drift detectors. It enhances various industrial applications such as machine control and sampling decision systems. The literature lacks a comprehensive summary and a systematic review of the state of the art in VM. To fill this gap, this study followed a systematic methodology to conduct a complete and structured literature review of VM. This paper presents a detailed analysis of the 199 papers that we identified based on our search and selection criteria. Following our methodological framework, we assigned these papers to categories and highlighted shortcomings. Finally, we discussed VM's use in various industrial fields, underlining its potential for every manufacturing industry. This study and the proposed framework are useful for both practitioners and academicians since they raise crucial theoretical and managerial questions as well as provide suggestions for further research on this critical topic.

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