Visible photoluminescence from a-Si based alloy (a-SiN/sub x/) thin films deposited by plasma enhanced CVD

Choi, Jung Chan; Heo, Duchang; Han, Il Ki; Choi, Won Jae; Park, Y.J.; Cho, W.J.; Song, Jae-Hoon; Lee, J.I.; Kim, Y.D.

doi:10.1109/plasma.2003.1229990

The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts.

DOI: 10.1109/plasma.2003.1229990

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Visible photoluminescence from a-Si based alloy (a-SiN/sub x/) thin films deposited by plasma enhanced CVD

Jung Chan Choi

Duchang Heo

Il Ki Han

et al.

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Visible photoluminescence from a-Si based alloy (a-SiN/sub x/) thin films deposited by plasma enhanced CVD

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