The separation of tiles from buildings degrades the aesthetic appeal of buildings and may result in structural failure. Therefore, tiles should be inspected periodically. However, manual inspections are expensive and require qualified experts. In this study, voids corresponding to tile separation were detected in a concrete specimen using nondestructive inspection based on electromagnetic wave detection. Furthermore, wave reflection models of healthy and defective tiles were created, and the effects of the void plane size on the reflection of defective tiles were considered. The correlation between the void plane size and the reflection intensity difference integral value was verified through multilayer scanning using these models. © 2022 Institute of Electrical Engineers of Japan. Published by Wiley Periodicals LLC.