Visualized strain profile in the process of crystal ion slicing of LiTaO<sub>3</sub>

Ma, Changdong; Lu, Fei; Xu, Bo; Fan, Rong

doi:10.1088/0022-3727/49/20/205301

Cited by 6 publications

(6 citation statements)

References 25 publications

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“…Usually, an out-of-plane tensile stress induced by ion implantation is formed at the implanted plane. 27,33 However, the compressive strain might be induced in the other planes. In this study, the XRD measurement was performed on the (030) plane instead of the 42°rotated Y implanted plane, and a compressive stress was measured.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

“…After annealing at 200 °C for 30 min, several platelike defects that parallel to the surface were generated at a depth of 511 nm (Figure b). It was suggested that the damages produced by H implantation will result in the formation of strain distribution and lattice defects in the target material. − With annealing, the release of the out-of-plane strain will drives vacancies to diffuse to the peak of H profile and lead to a saturation of vacancies. Therefore, the platelike defects were generated, and the direction of the platelike defects is perpendicular to the out-of-plane direction .…”

Section: Resultsmentioning

confidence: 99%

“…As reported by Wang et al, the stress in LT that was induced by ion implantation is complicated, and it is different from the single stress field that is enforced outside the sample. Usually, an out-of-plane tensile stress induced by ion implantation is formed at the implanted plane. , However, the compressive strain might be induced in the other planes. In this study, the XRD measurement was performed on the (030) plane instead of the 42° rotated Y implanted plane, and a compressive stress was measured.…”

Section: Resultsmentioning

confidence: 99%

See 2 more Smart Citations

Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO₃-on-Insulator (LTOI) Substrate for a SAW Resonator

Yan

Huang

Zhou

et al. 2019

ACS Appl. Electron. Mater.

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A high-performance filter is the key component in 5G communication. A surface acoustic wave (SAW) resonator fabricated on a piezoelectric thin film instead of piezoelectric bulk substrate can achieve a higher quality factor (Q) and a lower temperature coefficient of frequency (TCF).Here we performed the fabrication of 4 in. 42°rotated Y-cut LiTaO 3 -on-insulator (LTOI) hybrid substrate applied for the surface acoustic wave (SAW) radio-frequency (RF) resonators. This heterogeneous substrate combining a submicrometer single crystalline LT thin film on a Si wafer was achieved by using the ion-cut process with direct wafer bonding. The kinetics of surface blistering and the defects evolution in 75 keV H + implanted LT samples were investigated by annealing at various temperatures ranging from 170 to 230 °C. The activation energy for forming the blistering crack is around 1.34 eV. After direct wafer bonding, a wafer-scale LT thin film with single crystalline quality was successfully transferred onto the Si substrate. The crystalline quality was further improved via a postannealing at 400 °C, which is demonstrated by the reduction of the full width at half-maximum of the XRD rocking curve from 167 to 48 arcsec. The roughness of the blistering surface of the LT thin film was significantly reduced from 12 to 0.2 nm by an optimized chemical mechanical polishing (CMP) process, in which the damage layer of 30 nm was removed as well. Finally, a 350 MHz one-port SAW resonator based on the fabricated LTOI substrate was demonstrated.

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Section: ■ Results and Discussionmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

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Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO₃-on-Insulator (LTOI) Substrate for a SAW Resonator

Yan

Huang

Zhou

et al. 2019

ACS Appl. Electron. Mater.

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“…In fact, LT crystals are already widely employed in integrated photonics and surface acoustic wave (SAW) devices [26][27][28][29]. In recent years, lithium tantalate on insulator (LTOI) is increasingly favored as the material of choice for integrated electro-optic and SAW devices [30][31][32]. This is because of its high-index contrast-which leads to a robust light guidance and a high-performance integrated device with a small footprint-that is particularly suitable for microring resonators.…”

Section: Introductionmentioning

confidence: 99%

Design, Simulation, and Analysis of Optical Microring Resonators in Lithium Tantalate on Insulator

et al. 2021

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In this paper we design, simulate, and analyze single-mode microring resonators in thin films of z-cut lithium tantalate. They operate at wavelengths that are approximately equal to 1.55 μm. The single-mode conditions and transmission losses of lithium tantalate waveguides are simulated for different geometric parameters and silica thicknesses. An analysis is presented on the quality factor and free spectral range of the microring resonators in lithium tantalate at contrasting radii and gap sizes. The electro-optical modulation performance is analyzed for microring resonators with a radius of 20 μm. Since they have important practical applications, the filtering characteristics of the microring resonators that contain two straight waveguides are analyzed. This work enhances the knowledge of lithium tantalate microring structures and offers guidance on the salient parameters for the fabrication of highly efficient multifunctional photonic integrated devices, such as tunable filters and modulators.

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“…When the [0001] c-axis is perpendicular to the wafer surface (Z-Cut orientation) and the implanted layer is pseudomorphic to a template, there is only one nonzero out-of-plane strain component of the extrinsic (reference to a template lattice) strain tensor, which can be directly measured. 10 Real devices require off-axis single crystals with the piezoelectric axis tilted away from the normal to the wafer surface and rotated around the [1 120] direction. 11 In that case, the surface does not correspond to any crystallographic plane (Fig.…”

mentioning

confidence: 99%

Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H+ ions implanted LiTaO3

Louiset

Schamm-Chardon

Kononchuk

et al. 2021

Applied Physics Letters

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In the context of growing interest in strain engineering, we present a theoretical protocol for the reconstruction of extrinsic and intrinsic strain tensors in single-crystals attached to a template, with an arbitrary oriented coordinate system. Input data for the protocol are extrinsic deformations of lattice planes, i.e., measured with reference to a template. By combining the protocol with elasticity theory, material property modification can be elucidated. Different methods for strain measurements can take advantage of this approach. It has been applied for reconstruction of strain tensor depth distribution in off-axis LiTaO3 crystals implanted with H+ ions, which is the key step for piezoelectric thin film-on-insulator fabrication by the Smart Cut process. Modifications of composition, lattice parameters, and elastic constants are indicated and discussed.

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Visualized strain profile in the process of crystal ion slicing of LiTaO₃

Cited by 6 publications

References 25 publications

Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO₃-on-Insulator (LTOI) Substrate for a SAW Resonator

Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO₃-on-Insulator (LTOI) Substrate for a SAW Resonator

Design, Simulation, and Analysis of Optical Microring Resonators in Lithium Tantalate on Insulator

Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H+ ions implanted LiTaO3

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Visualized strain profile in the process of crystal ion slicing of LiTaO3

Cited by 6 publications

References 25 publications

Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO3-on-Insulator (LTOI) Substrate for a SAW Resonator

Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO3-on-Insulator (LTOI) Substrate for a SAW Resonator

Design, Simulation, and Analysis of Optical Microring Resonators in Lithium Tantalate on Insulator

Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H+ ions implanted LiTaO3

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Product

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Visualized strain profile in the process of crystal ion slicing of LiTaO₃

Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO₃-on-Insulator (LTOI) Substrate for a SAW Resonator

Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO₃-on-Insulator (LTOI) Substrate for a SAW Resonator