1982
DOI: 10.1016/0038-1101(82)90158-7
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Volatile component loss and contact resistance of metals on GaAs and GaP during annealing

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Cited by 58 publications
(8 citation statements)
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“…• C for 3 min, where Ni/AuGe/Ge is used for the nside and Ni/Zn/Au for the p-side [14][15][16]. Each piece of the wafer contains between 20 and 25 mesas of each size.…”
Section: Sample Preparationmentioning
confidence: 99%
See 1 more Smart Citation
“…• C for 3 min, where Ni/AuGe/Ge is used for the nside and Ni/Zn/Au for the p-side [14][15][16]. Each piece of the wafer contains between 20 and 25 mesas of each size.…”
Section: Sample Preparationmentioning
confidence: 99%
“…The processing of the devices for the DLTS experiments involves standard optical lithography and dry etching techniques, yielding round mesa structures of 200 or 400normalμm radius. The contacts are evaporated thermally and annealed at 400C for 3 min, where Ni/AuGe/Ge is used for the n ‐side and Ni/Zn/Au for the p ‐side . Each piece of the wafer contains between 20 and 25 mesas of each size.…”
Section: Sample Preparationmentioning
confidence: 99%
“…The contacts are evaporated thermally and annealed at 400 C for 3 min, where Ni/AuGe/ Ge is used for the n-side and Ni/Zn/Au for the p-side. [16][17][18] The samples are characterized with both conventional 12 and charge-selective DLTS. 6,19 The bias voltage range in which charging and discharging of the QDs occur is determined first by means of capacitance-voltage (C-V) spectroscopy.…”
mentioning
confidence: 99%
“…It is well documented that Ga migrates into Au at temperatures above 400 °C (see, for example, ref and references therein). Decomposition of the reacted volume of GaAs releases As, which diffuses through a polycrystalline Au–Ga layer and re-evaporates . The rate of this process can be controlled, for example, by tuning the As 2 pressure in the chamber or using encapsulating layers …”
Section: Discussionmentioning
confidence: 99%