Voltage–Amplitude Response of Superharmonic Resonance of Second Order of Electrostatically Actuated MEMS Cantilever Resonators

Caruntu, Dumitru I.; Botello, Martin; Reyes, Christopher; Beatriz, Julio

doi:10.1115/1.4042017

Cited by 11 publications

(1 citation statement)

References 36 publications

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“…Younis et al [47] proposed the construction of ROMs by multiplying the equation of motion by the electric load denominator. Many systems were analyzed following this strategy, such as arch resonators [28,29,[48][49][50], arches over flexible supports [51], functionally graded viscoelastic microbeams with imperfections [52], cantilever resonators [53][54][55], narrow microbeams subject to fringing fields [56][57][58] and microscale beams described by the modified couple stress theory [30][31][32][59][60][61][62][63].…”

Section: Introductionmentioning

confidence: 99%

Parameter uncertainty and noise effects on the global dynamics of an electrically actuated microarch

Benedetti

Gonçalves

Lenci

et al. 2023

J. Micromech. Microeng.

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This work aims to study the effect of uncertainties and noise on the nonlinear global dynamics of a micro-electro-mechanical arch obtained from an imperfect microbeam under an axial load and electric excitation. An adaptative phase-space discretization strategy based on an operator approach is proposed. The Ulam method, a classical discretization of flows in phase-space, is extended here to nondeterministic cases. A unified description is formulated based on the Perron-Frobenius, Koopman, and Foias linear operators. Also, a procedure to obtain global structures in the mean sense of systems with parametric uncertainties is presented. The stochastic basins of attraction and attractors’ distributions replace the usual basin and attractor concepts. For parameter uncertainty cases, the phase-space is augmented with the corresponding probability space. The microarch is assumed to be shallow and modelled using a nonlinear Bernoulli-Euler beam theory and is discretized by the Galerkin method using as interpolating function the linear vibration modes. Then, from the discretized multi degree of freedom model (mdof) model, an accurate single degree of freedom (sdof) reduced order model, based on theory of nonlinear normal modes, is derived. Several competing attractors are observed, leading to different (acceptable or unacceptable) behaviours. Extensive numerical simulations are performed to investigate the effect of noise and uncertainties on the coexisting basins of attraction, attractors` distributions, and basins boundaries. The appearance and disappearance of attractors and stochastic bifurcation are observed, and the time-dependency of stochastic responses is demonstrated, with long-transients influencing global behaviour. To consider uncertainties and noise in design, a dynamic integrity measure is proposed via curves of constant probability, which give quantitative information about the changes in structural safety. For each attractor, the basin robustness as a function of a stochastic parameter is investigated. The weighted basin area can quantify the integrity of nondeterministic cases, being also the most natural generalization of the global integrity measure. While referring to particular MEMS, the relevance of the dynamical integrity analysis for stochastic systems to quantify tolerances and safety margins is underlined here.

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