2020
DOI: 10.1016/j.ultramic.2019.112889
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Voltage contrast imaging with energy filtered signal in a field-emission scanning electron microscope

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Cited by 12 publications
(4 citation statements)
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“…Due to these technical limitations, only a small number of electron energy analyser attachments have proved capable of carrying out secondary electron energy spectroscopy (SEES) in the SEM [26][27][28][29] . It should be noted that the ad-hoc attempts of using in-built LVSEM SE detection systems to energy filter the SE detector signal have succeeded in providing image enhancement, but have not proved precise enough to carry out SE energy spectroscopy [30][31][32][33][34][35][36] . This is because their output signals are influenced by tertiary electrons generated by internal electrode scattering and they detect SEs that have a complex mix of different emission angles and energies.…”
mentioning
confidence: 99%
“…Due to these technical limitations, only a small number of electron energy analyser attachments have proved capable of carrying out secondary electron energy spectroscopy (SEES) in the SEM [26][27][28][29] . It should be noted that the ad-hoc attempts of using in-built LVSEM SE detection systems to energy filter the SE detector signal have succeeded in providing image enhancement, but have not proved precise enough to carry out SE energy spectroscopy [30][31][32][33][34][35][36] . This is because their output signals are influenced by tertiary electrons generated by internal electrode scattering and they detect SEs that have a complex mix of different emission angles and energies.…”
mentioning
confidence: 99%
“…This hypothesis was verified by collecting the energy profile from a carbide particle (1-blue line) and its neighboring matrix (2-orange line). The profiles were obtained using the filtering capability of the SU-8230 upper detector in a similar manner as reported by Hashimoto and coworkers [37] and are shown in Figure 1. Figure 1(a) shows a typical SE image obtained by the upper detector when collecting the full energy spectrum of secondary electrons, and the secondary electron energy distribution profiles are given in Figure 1(b).…”
Section: Electron Backscatter Diffraction (Ebsd)mentioning
confidence: 84%
“…Thus, backscattered images can be a proper method to characterize metallic phases [42]. image [43][44] Optical Microscopy possesses a wide field of view, ensuring a high throughput screening and the possibility to collect vast amounts of data (see Fig. 5) for postprocessing and machine learning [35].…”
Section: Figure 3 Schematic Representation Of An Stm Device and An Stm-image [41]mentioning
confidence: 99%