Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators

Piazza, Gianluca; Abdolvand, Reza; Ho, G.K.; Ayazi, Farrokh

doi:10.1016/j.sna.2003.10.021

Cited by 91 publications

(53 citation statements)

References 11 publications

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“…Mechanical quality factor helps in designing of a sensor and actuator and it is one of the most important parameter to determine the energy loss characteristic of piezoelectric material [12,13].The range of the mechanical quality factor (Q m ) varies from 3700 at 158 kHz frequency to 930 at 1.18 MHz frequency [14]. A study reported a new class of piezoelectric materials having high mechanical quality factor which vibrate at 1.7MHz and have a lot of applications as sensor and actuator [15]. Up till now the development of piezoelectric transducers was mainly based on trial and error which is not only time consuming as well as much expensive.…”

Section: Historical Backgroundmentioning

confidence: 99%

Investigation of Electrical Properties & Mechanical Quality Factor of Piezoelectric Material (PZT-4A)

Butt¹,

Anjum²,

Sultan³

et al. 2017

Journal of Electrical Engineering and Technology

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-Piezoelectricity is the capability of a piezoelectric material to change mechanical energy into electrical energy. The determination of electrical and mechanical properties plays a significant role in characterizing the piezoelectric material. The energy losses characteristics of piezoelectric material can be described by mechanical quality factor. In this paper, the output voltage and mechanical quality factor of Lead Zirconate Titanate (PZT-4A) piezoelectric material is determined under various resistance and loading conditions by using the test setup. The commercial FEM software ABAQUS is used to analyze the performance of piezoelectric material under static loading conditions. It is observed that these properties affect the performance of a material particularly in the designing of smart structures. The experimental results are partially compared to the simulation values.

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Section: Historical Backgroundmentioning

confidence: 99%

Investigation of Electrical Properties & Mechanical Quality Factor of Piezoelectric Material (PZT-4A)

Butt¹,

Anjum²,

Sultan³

et al. 2017

Journal of Electrical Engineering and Technology

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“…Plates similar to pMUT structures with strong PZT films are very much suited for ink jet printing heads. Resonators of flexural modes have also been proposed for analogue signal processing, as needed for instance at intermediate frequencies (few MHz) in mobile communication [88,89]. At lower frequencies, flexural structures were demonstrated for applications as microphones in photoacoustic gas sensors [90], as accelerometers [91], and more recently for energy scavenging [79,80].…”

Section: Basics Of Micromachining and Piezoelectric Thin Film Structuresmentioning

confidence: 99%

Polar Oxide Thin Films for MEMS Applications

Muralt

2013

Chemical Solution Deposition of Functional Oxide Thin Films

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“…(a) Changing structure dimensions (Gieras et al 2007) (b) Change the mass centre of gravity (Wu et al 2008) (c) Change spring stiffness, electrostatically (Scheibner et al 2005;Lee et al 2008;Piazza et al 2004), magnetically (Challa et al 2008), Piezoelectrically (Peter et al 2009;Wischke et al 2010), thermally (Remtema and Lin 2001) (d) Straining the structure (Mukherjee 2007; Hu et al 2007;Eichhorn et al 2009;Zhu et al 2008Zhu et al , 2009 While (a) and (b) are not suitable for in situ tuning, (c) is suitable, and (d) is suitable for manual intermittent tuning (Zhu and Beeby 2011).…”

Section: Introductionmentioning

confidence: 99%

Simulation and experimental investigation of a wide band PZ MEMS harvester at low frequencies

Salim

Salleh

Salim³

2012

Microsyst Technol

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A commercial brass reinforced PZ bimorph cantilever of the type 5H4E was simulated using COMSOL FEM software and then a serious of experimental tests were carried out in a vibration laboratory using a labview of NI make as instrumentation and control system. By using a shaker the cantilever was vibrated and set into acceleration of 0.25 g rms during all stages as this value was considered to be available and acceptable in balanced large rotating machines in industry. Field vibration spectrum analysis was carried out in a power station confirmed that. A band of frequencies ranging from 30 to 109 Hz was experimentally tested by using different perforated steel shims as a proof mass at the end of the cantilever. Values of 63 lW/cm 3 at a frequency of 33 Hz for power density, 187 lW for max power, 14.8 V for max OCV, and 8.26 V for max, on load voltage, were obtained. Frequency resolution of 1 Hz was experienced. Trends of the results obtained experimentally and through simulation were comparable.

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Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators

Cited by 91 publications

References 11 publications

Investigation of Electrical Properties & Mechanical Quality Factor of Piezoelectric Material (PZT-4A)

Investigation of Electrical Properties & Mechanical Quality Factor of Piezoelectric Material (PZT-4A)

Polar Oxide Thin Films for MEMS Applications

Simulation and experimental investigation of a wide band PZ MEMS harvester at low frequencies

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