2010
DOI: 10.31399/asm.cp.istfa2010p0038
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Volume Electrical Failure Analysis for Product-Specific Yield Enhancement

Abstract: Yield on specific designs often falls far short of predicted yield, especially at new technology nodes. Product-specific yield ramp is particularly challenging because the defects are, by definition, specific to the design, and often require some degree of design knowledge to isolate the failure. Despite the wide variety of advanced electrical failure analysis (EFA) techniques available today, they are not routinely applied during yield ramp. EFA techniques typically require a significant amount of test patter… Show more

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