“…In particular, III-V compound semiconductors have strong potential for meeting with the performance using metamorphic growth; InP devices, such as lattice-matched high electron mobility transistors (HEMTs) [2] and heterojunction bipolar transistors (HBTs) [3], have shown excellent microwave performance. In(Ga,Al)As metamorphic devices on GaAs, such as metamorphic HEMTs [4][5][6][7] and metamorphic HBTs [8,9] using lattice-mismatched growth, have been extensively developed for performance balance with the InP devices, and consequently they have exhibited performance equivalent to the InP devices [10].…”