Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human–Machine Interactions

Abstract

High-performance flexible sensors are essential for real-time information analysis and constructing noncontact communication modules for emerging human−machine interactions. In these applications, batch fabrication of sensors that exhibit high performance at the wafer level is in high demand. Here, we present organic nanoforest-based humidity sensor (NFHS) arrays on a 6 in. flexible substrate prepared via a facile, cost-effective manufacturing approach. Such an NFHS achieves state-of-the-art overall performance: high sensitivity and fast recovery time; the best properties are at a small device footprint. The high sensitivity (8.84 pF/% RH) and fast response time (5 s) of the as-fabricated organic nanoforests are attributed to the abundant hydrophilic groups, the ultra-large surface area with a huge number of nanopores, and the vertically distributed structures beneficial to the transfer of molecules up and down. The NFHS also exhibits excellent long-term stability (90 days), superior mechanical flexibility, and good performance repeatability after bending. With these superiorities, the NFHS is further applied as a smart noncontact switch, and the NFHS array is used as the motion trajectory tracker. The wafer-level batch fabrication capability of our NFHS provides a potential strategy for developing practical applications of such humidity sensors.

Oriented bouncing of droplets with a small Weber number on inclined one-dimensional nanoforests

“…To prepare such asymmetric 1D nanostructures, a number of techniques have been developed. 30–36 For instance, the process of soft lithography can be used to prepare 1D asymmetric structures, but this method is limited by the materials that can be used and also by the inability of the rigid template to flexibly adjust the morphologies and dimensions. 37–41 Finding a fast and easy method for realizing droplet unidirectional movement on nanoscale anisotropic surfaces has become more and more urgent.…”

Integration of Flexible Touch Panels and Machine Learning: Applications and Techniques

“…These sensors are capable of not only detecting user touch inputs [ 3 ] but also perceiving the shape, [ 4 ] texture, [ 5 ] and pressure of objects, [ 6 ] offering users a more authentic and multidimensional interactive experience. [ 7 ] In recent years, as mobile devices, [ 8 ] health monitoring, [ 9 ] and human–machine interaction [ 10 ] have rapidly developed, flexible touch panels have become a focal point. These panels aim to detect and interpret user touch inputs and offer not only the functionalities of traditional touch screens [ 11 ] but also remarkable flexibility [ 12 ] and adaptability for use in curved and complex‐shaped devices.…”