Wafer-scale controlled growth of MoS₂ by magnetron sputtering: from in-plane to inter-connected vertically-aligned flakes

Abstract

Recently, Molybdenum disulfide (MoS2) has attracted great attention due to its unique characteristics and potential applications in various fields. The advancements in the field have substantially improved at the laboratory scale however, a synthesis approach that produces large area growth of MoS2 on a wafer scale is the key requirement for the realization of commercial two-dimensional technology. Herein, we report tunable MoS2 growth with varied morphologies via RF sputtering by controlling growth parameters. The controlled growth from in-plane to vertically-aligned MoS2 flakes has been achieved on a variety of substrates (Si, Si/SiO2, sapphire, quartz, and carbon fiber). Moreover, the growth of vertically-aligned MoS2 is highly reproducible and is fabricated on a wafer scale. The flakes synthesized on the wafer show high uniformity, which is corroborated by the spatial mapping using Raman over the entire 2-inch Si/SiO2 wafer. The detailed morphological, structural, and spectroscopic analysis reveals the transition from in-plane MoS2 to vertically-aligned MoS2 flakes. This work presents a facile approach to directly synthesize layered materials by sputtering technique on wafer scale. This paves the way for designing mass production of high-quality 2D materials, which will advance their practical applications by integration into device architectures in various fields.

Recent Advances in Broadband Photodetectors from Infrared to Terahertz

“…Explore new materials and large-area growth: We must continue to study new thermal and photoelectric materials, such as two-dimensional materials, topological insulators, organic-inorganic hybrid materials, and perovskites, which are expected to cover a wider range of wavelength bands and improve the performance and sensitivity of broadband photodetectors. To produce cost-effective FPAs ultimately, research into large-area deposition techniques for materials is also necessary, including various scalable deposition techniques such as magnetron sputtering [111], pulsed-laser deposition [112], atomic layer deposition [113], van der Waals growth [114], and others.…”

A modified CVD method for the synthesis of monolayer MoS2 and photoelectric improvement by HfO2 passivation

“…Raman spectroscopy, a powerful nondestructive characterization tool, has been used to study different morphologies of MoS 2 [23,24]. It is frequently reported that four firstorder Raman active modes at 32 cm −1 (E 2g…”

2D/2D Nanostructured System Based on WO3/WS2 for Acetone Sensor and Breath Analyzer

“…Sensor response, selectivity, resolution, accuracy, and precision limits of sensing devices are constantly being increased. 2,7,8 Their use and application potential are also quickly growing at the same time. In this study, we make a selective acetone sensor based on 2D/2D heterostructure of WO 3 /WS 2 to work in biomedical-to industrial-scale applications with the capability of continuous exhaled breath monitoring verified by experimental and computational studies.…”

“…It is obvious that sensors that can deliver accurate timely information have a crucial role to play in limiting the transmission of viruses and diseases, thereby saving many lives, particularly during this period of sanitary emergency known as COVID-19. , Researchers in this field are continuously seeking more sensitive and precise detection techniques, measurement principles, and innovative analytical methodologies to develop modern sensing devices and instruments. , However, the majority of volatile organic compound (VOC) sensors on the market today provide data on total VOCs rather than individual VOC, and no sensor is available to work for biomedical-scale (lower concentrations) to industrial-scale (higher concentrations) applications, while selectivity is another issue that sensor technology faces. , Due to social expectations, critical sensor performance characteristics including sensitivity, selectivity, stability, and utility must be increased. Sensor response, selectivity, resolution, accuracy, and precision limits of sensing devices are constantly being increased. ,, Their use and application potential are also quickly growing at the same time. In this study, we make a selective acetone sensor based on 2D/2D heterostructure of WO 3 /WS 2 to work in biomedical- to industrial-scale applications with the capability of continuous exhaled breath monitoring verified by experimental and computational studies.…”