2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) 2020
DOI: 10.1109/mems46641.2020.9056367
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Wafer-Scale Graphene-Based Soft Electrode Array with Optogenetic Compatibility

Abstract: This paper reports on the characterization of a microfabricated wafer-scale, graphene-based, soft implant for spinal cord applications. Graphene is used because of its high transparency and good conductivity, making it suitable for optogenetic applications. Moreover it has a high mechanical strength and is potentially biocompatible. The implant consists of multi-layered chemical vapor deposited graphene, in the form of electrodes and tracks, encapsulated between 2 layers of silicone. Methods such as Raman spec… Show more

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Cited by 4 publications
(2 citation statements)
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“…10 Recently developed multilayer CVD graphene electrodes, using a transfer-free fabrication process, reported an increase in CSC and impedance reduction due to an increase in the quantum capacitance as a result of using multiple graphene layers. 11,12 However, increasing the number of layers has only impact on the quantum capacitance up to a threshold of 6 layers, 10 while each added layer reduces the graphene's optical transparency. 11,13 Moreover, scaling down the electrode size is necessary to selectively record signals from targeted neurons.…”
Section: Introductionmentioning
confidence: 99%
“…10 Recently developed multilayer CVD graphene electrodes, using a transfer-free fabrication process, reported an increase in CSC and impedance reduction due to an increase in the quantum capacitance as a result of using multiple graphene layers. 11,12 However, increasing the number of layers has only impact on the quantum capacitance up to a threshold of 6 layers, 10 while each added layer reduces the graphene's optical transparency. 11,13 Moreover, scaling down the electrode size is necessary to selectively record signals from targeted neurons.…”
Section: Introductionmentioning
confidence: 99%
“…However, undoped monolayer graphene suffers from low sheet conductivity 9 and a low charge storage capacity (CSC) due to the dominance of its small quantum capacitance 10 . Multilayer CVD graphene electrodes have been recently reported using a transferfree fabrication process 11,12 . Although using multiple layers of graphene increases the quantum capacitance and consequently reduces the impedance and leads to higher CSC 11 , increasing the number of layers has only impact on the quantum capacitance up to a threshold of 6 layers 10 , while each added layer reduces the graphene's optical transparency 11,13 .…”
Section: Introductionmentioning
confidence: 99%