Wafer-scale replication and testing of micro-optical components for VCSELs

Gimkiewicz, Christiane; Moser, M.; Obi, S.; Urban, Claus; Pedersen, J.S.; Thiele, Hans; Zschokke, Christian; Gale, M. D.

doi:10.1117/12.544793

Cited by 13 publications

(7 citation statements)

References 9 publications

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“…Moreover, this technique enables thick pedestal fabrication for accurate lens vertical positioning. Collective replication of refractive as well as diffractive elements was successfully demonstrated on multimode VCSEL wafers using sol-gel materials (Figure 7) [38]. Note that this technique is better suited for mass production than for custom-made prototyping, since the lens mould has to be modified in case the real numerical aperture of the devices does not match exactly with the aimed value.…”

Section: Replication Methodsmentioning

confidence: 99%

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Bardinal

Camps

Reig

et al. 2011

Advances in Optical Technologies

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We describe the main recent technological approaches that associate micro-optical elements to VCSELs in order to control their output beam and to improve their photonic integration. These approaches imply either a hybrid assembly or a direct integration technique. They are compared with regards to their tolerance to alignment errors and to their ease of implementation onto arrays of devices at a wafer level. In particular, we detail the integration techniques we have developed for self-aligned polymer microlens fabrication for beam collimation and short distance beam focusing. Finally, designs to achieve active micro-optics or to exploit novel nanophotonic effects are discussed.

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Section: Replication Methodsmentioning

confidence: 99%

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Bardinal

Camps

Reig

et al. 2011

Advances in Optical Technologies

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“…These initial tests prove that the micro-pillars could be used to improve the coupling efficiency between optoelectronic input/output chips and optical waveguides in printed circuit boards, where an air gap typically exists between the waveguide and the optoelectronic due to the chip flip-chip bonding process typically used to mount these chips on the printed circuit board. [5,14,15], as depicted schematically in Fig. 11(b).…”

Section: Applicationsmentioning

confidence: 99%

“…We aim to create 500 lm or higher pillars with a diameter of $50 lm and $140 lm, since these dimensions are of interest for two particular applications. The 50 lm-diameter pillars could function as optical waveguide structures to aid in the interconnection between optoelectronic input/output chips and optical waveguides in printed circuit boards for gigascale integration optical interconnects [5,14,15]. The 140 lm-diameter pillars could serve to create a micro-villi environment, mimicking human tissue for in vitro bio-chemical applications [16,17].…”

Section: Introductionmentioning

confidence: 99%

Deep proton writing of high aspect ratio SU-8 micro-pillars on glass

Ebraert

Rwamucyo

Thienpont

et al. 2016

Nuclear Instruments and Methods in Physics Research Section B:

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Deep proton writing (DPW) is a fabrication technology developed for the rapid prototyping of polymer micro-structures. We use SU-8, a negative resist, spincoated in a layer up to 720 lm-thick in a single step on borosilicate glass, for irradiation with a collimated 12 MeV energy proton beam. Micro-pillars with a slightly conical profile are irradiated in the SU-8 layer. We determine the optimal proton fluence to be 1.02 Â 10 4 lm À2 , with which we are able to repeatably achieve micro-pillars with a top-diameter of 138 ± 1 lm and a bottom-diameter of 151 ± 3 lm. The smallest fabricated pillars have a top-diameter of 57 ± 5 lm. We achieved a root-mean-square sidewall surface roughness between 19 nm and 35 nm for the fabricated micro-pillars, measured over an area of 5 Â 63.7 lm. We briefly discuss initial testing of two potential applications of the fabricated micro-pillars. Using $100 lm-diameter pillars as waveguides for gigascale integration optical interconnect applications, has shown a 4.7 dB improvement in optical multimode fiber-to-fiber coupling as compared to the case where an air-gap is present between the fibers at the telecom wavelength of 1550 nm. The $140 lm-diameter pillars were used for mold fabrication with silicone casting. The resulting mold can be used for hydrogel casting, to obtain hydrogel replicas mimicking human tissue for in vitro bio-chemical applications.

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“…The emission angle is broadened and the full-width half-maximum (FWHM) angle is increasing. When a lens is placed close to the facet of a multi-mode VCSEL, the extension of the FWHM angle can be varied due to a weak optical feed-back, but the principle mode behavior is still visible in the intensity distribution [4]. However, for some metrology systems, a non-current dependent illumination pattern is mandatory.…”

Section: Introductionmentioning

confidence: 98%

Compact illumination modules based on high-power VCSEL arrays

Gimkiewicz

Columbus

Moser³

2008

SPIE Proceedings

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Multi-mode VCSEL arrays are candidates for compact illumination modules with applications as flash light illumination for the detailed imaging of fast moving objects (> 100 m/s) or for time-of-flight cameras with modulation frequency in the > 10 MHz domain. Rise and fall times have to be as short as a few nanoseconds, while the optical output power has to be in the order of one Watt. In this paper we investigate, for multi-mode VCSEL arrays, the dependency of the farfield pattern on the drive current and on the distance to a reflecting surface. We demonstrate that, with the help of diffusing elements, the current dependency of the far-field pattern can be reduced. We have realized an illumination unit with modulation frequencies of up to 80 MHz and an optical output of 1 Watt.

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Wafer-scale replication and testing of micro-optical components for VCSELs

Cited by 13 publications

References 9 publications

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Deep proton writing of high aspect ratio SU-8 micro-pillars on glass

Compact illumination modules based on high-power VCSEL arrays

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