Wafer-scale self-assembled 2.5D metasurface for efficient near-field and far-field electromagnetic manipulation

Huang, Yijia; Yang, Rongxiao; Xiao, Tian; Li, Ling; Tian, Mingyang; Xie, Zhengwei; Zheng, Jie; Zhu, Jiaojun; Su, Yanling; Chen, Weidong; Liu, Ke; Tang, Mingjun; Li, Ling

doi:10.1016/j.apsusc.2022.154244

Cited by 14 publications

(7 citation statements)

References 59 publications

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“…In addition, if the cost of constructing a clean room is included in our estimation of the costs of the EBL method, then the alternative method presented in this paper is more than 50 times more cost-effective. Comparing the production times, our method requires only 1/10 of the time of the EBL method. − , Thus, the cost-effective new method presented in this article produces effective field enhancement substrates and offers significant time savings.…”

Section: Resultsmentioning

confidence: 95%

“…The Ag nanohole structure exhibited a large EF (58 ± 14), whereas a much higher EF (121 ± 28) was obtained for the Ag nano-sawtooth structure. Thus, although nanosphere lithography is a popular method for preparing nanohole arrays, − in this study, we used this method to prepare a nano-sawtooth structure as well as a nanohole array, and it was the nano-sawtooth structure that was found to have significantly increased EFs. SERS measurements were also acquired, and the SERS EF was found to be 2.3 × 10 3 (see the Supporting Information).…”

Section: Resultsmentioning

confidence: 99%

“…Comparing the production times, our method requires only 1/10 of the time of the EBL method. [25][26][27][28][29][30][31]39 Thus, the cost-effective new method presented in this article produces effective field enhancement substrates and offers significant time savings.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

“…Ag nanohole arrays and nano-sawtooth structures were prepared using three simple procedures (Scheme ), based on a modified nanosphere lithography method. − Briefly, an aqueous suspension of polystyrene (PS) nanospheres with diameters of 800 nm (Duke Scientific, USA) was dropped onto a silicon wafer and air-dried for 2 h. A monolayer of PS nanospheres with a close-packed array structure was obtained (step 1). Subsequently, the monolayer of PS nanospheres on the Si wafer was etched using plasma equipment (Femto Science, CUTE, Republic of Korea) at a power of 90 W and an O 2 flow rate of 40 sccm.…”

Section: Experimental Methodsmentioning

confidence: 99%

“…This is because the EBL method offers accurate nanoscale patterns as well as very high-quality samples for scientific research. However, it is difficult to obtain large-area structures (∼100 μm) using EBL, and an unreasonably long time would be required to produce commercially viable enhancement substrates; hence, this method is not suitable for scalable production. , In contrast, nanosphere lithography − is among the most facile methods for preparing periodic structures that span large areas.…”

Section: Introductionmentioning

confidence: 99%

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Large-Area Plasmon Mapping via an Optical Technique: Silver Nanohole Array and Nano-Sawtooth Structures

Sakamoto

Saitow

2023

J. Phys. Chem. C

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Silver nanostructures are among the most important platforms for developing efficient plasmonic materials, and edges and/or spikes in such structures can produce highly localized surface plasmons, resulting in dramatic electromagnetic field enhancement. In addition, if the enhanced field and/or localized surface plasmons were to be visualized in a periodic structure with long-range order, then this data would be invaluable for plasmonics researchers and engineers. Herein, we present an optical technique for plasmon mapping in the silver nanohole array and edge (nano-sawtooth) structures over large areas (∼10 μm). Plasmon mapping via two-dimensional fluorescence intensity enhancement quantification with submicrometer spatial resolution revealed high enhancement factors of up to 200 for the nano-sawtooth structure. These measurements were performed alongside atomic force microscopy, scanning electron microscopy, and finite-difference time-domain calculations, and the enhancement mechanism was investigated. Furthermore, the silver nanohole array and nano-sawtooth structures were fabricated using straightforward and cost-effective processes.

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Section: Resultsmentioning

confidence: 95%

Section: Resultsmentioning

confidence: 99%

Section: ■ Results and Discussionmentioning

confidence: 99%

Section: Experimental Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Large-Area Plasmon Mapping via an Optical Technique: Silver Nanohole Array and Nano-Sawtooth Structures

Sakamoto

Saitow

2023

J. Phys. Chem. C

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Cost-Effective and Environmentally Friendly Mass Manufacturing of Optical Metasurfaces Towards Practical Applications and Commercialization

Seong,

Jeon,

Yang

et al. 2023

Int. J. of Precis. Eng. and Manuf.-Green Tech.

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Optical metasurfaces consisting of two-dimensional nanostructures have rapidly developed over the past two decades thanks to their potential for use as optical components, such as metalenses or metaholograms, with ultra-compact form factors. Despite these rapid developments, major challenges for the commercialization of metasurfaces still remain: namely their mass production and use in real-life devices. A lot of effort has been made to overcome the limitations of electron beam lithography which is commonly used to fabricate metasurfaces. However, a breakthrough in mass production is still required to bring the cost of metasurfaces down into the price range of conventional optics. This review covers deep-ultraviolet lithography, nanoimprint lithography, and self-assembly-based fabrication processes that have the potential for the mass production of both cost-effective and environmentally friendly metasurfaces. We then discuss metalenses and future displays/sensors that are expected to take advantage of these mass-produced metasurfaces. The potential applications of mass-produced optical metasurfaces will open a new realm for their practical applications and commercialization.

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Metamaterial absorbers with Au nanoctahedrons hybrid Ag nanowires for highly efficient UV–Vis absorption and SERS sensing

Zhang,

Li,

Chengguan

et al. 2024

Applied Surface Science

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Wafer-scale self-assembled 2.5D metasurface for efficient near-field and far-field electromagnetic manipulation

Cited by 14 publications

References 59 publications

Large-Area Plasmon Mapping via an Optical Technique: Silver Nanohole Array and Nano-Sawtooth Structures

Large-Area Plasmon Mapping via an Optical Technique: Silver Nanohole Array and Nano-Sawtooth Structures

Cost-Effective and Environmentally Friendly Mass Manufacturing of Optical Metasurfaces Towards Practical Applications and Commercialization

Metamaterial absorbers with Au nanoctahedrons hybrid Ag nanowires for highly efficient UV–Vis absorption and SERS sensing

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