2003
DOI: 10.1021/jp022489j
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Water Vapor Uptake in Photolithographic Polymers Observed by Infrared Near-Field Scanning Optical Microscopy in a Controlled Environment

Abstract: An infrared near-field scanning optical microscope (NSOM) is used in a controlled environment chamber to detect water vapor uptake in thin polymer films. A chemically amplified photoresist sample composed of alternating 2 µm lines of the original 1000 nm thick poly-(tert-butylmethacrylate) (PTBMA) and the photochemically modified 500 nm thick poly(methacrylic acid) (PMAA) is studied both in low and high water vapor environments. The degree of water vapor absorption by the sample is measured using the infrared … Show more

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Cited by 13 publications
(8 citation statements)
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“…This is an important polymer characteristic for several applications such as personal care products, cement, agriculture, membranes, sensors, and in drug delivery. The moisture absorption of materials from air can be measured using various equipments namely permeation analyzer, dynamic vapor sorption instrument, infrared near‐field scanning optical microscope, stress analyzer, quartz crystal microbalance, and electro‐micro balance . In this study, samples were kept in a glass chamber that was preconditioned at specific RH and the samples were weighed periodically.…”
Section: Resultsmentioning
confidence: 99%
“…This is an important polymer characteristic for several applications such as personal care products, cement, agriculture, membranes, sensors, and in drug delivery. The moisture absorption of materials from air can be measured using various equipments namely permeation analyzer, dynamic vapor sorption instrument, infrared near‐field scanning optical microscope, stress analyzer, quartz crystal microbalance, and electro‐micro balance . In this study, samples were kept in a glass chamber that was preconditioned at specific RH and the samples were weighed periodically.…”
Section: Resultsmentioning
confidence: 99%
“…Gavara et al 28 investigated the sorption and transport properties of water through films of Nylon-6 with this technique. Other instruments that measure the water uptake of materials from air are permeation analyzers, 29 dynamic vapor sorption instruments, 30 infrared near-field scanning optical microscopes, 31 stress analyzers, 32 and quartz crystal microbalances. 33 Alongside these techniques, other research groups have used desiccators conditioned at specific humidities in which the samples were weighed at specific time intervals in order to determine the water-uptake ability of the polymers.…”
Section: Introductionmentioning
confidence: 99%
“…8 Proof of this importance is that moisture absorption has been measured recently in several photoresist systems. 9,10 However, in these cases, the influence of interfaces was ignored.…”
Section: Introductionmentioning
confidence: 99%