Wave front phase imaging of wafer geometry using high pass filtering to reveal nanotopography

Advanced phase shifting algorithms: development and evaluation

“…These iterations enable the AIA's phase extraction without prior knowledge of the phase shifts and also cause a much higher computation cost compared to the trigonometric identities based kPSAs. In modern precision metrology applications, the number of frames could reach more than ten [208] and the number of pixels per fringe pattern could reach more than tens of millions [209]. Hence, large frame numbers and/or large pixel number make the inefficiency problem in phase extraction much more serious for the AIA.…”