Wave-Front Quality Analysis of Three-Dimension Pinhole Vector Diffractional in Extreme Ultraviolet Region

Zengxiong, 卢增雄 Lu; Chunshui, 金春水 Jin; Li-chao, 张立超 Zhang; Liping, 王丽萍 Wang

doi:10.3788/aos20103010.2849

Cited by 3 publications

(1 citation statement)

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“…In 2004, Otaki et al suggested that, due to the pinhole size of the pinhole plate reaching the order of the wavelength, the accurate estimation of the diffracted waves can only be achieved using vector diffraction theory. They conducted a two-dimensional modeling of the pinhole plate and utilized the rigorous coupled wave (RCW) method to obtain the far-field optical field distribution of the diffracted waves [9]. In 2010, Zengxiong Lu et al from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, carried out a three-dimensional modeling simulation of the pinhole plate in the extreme ultraviolet wavelength band.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of Orthogonal Polarization Point Diffraction Pinhole Plate

Han,

Feng,

Zhang

et al. 2024

Photonics

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The pinhole plate is a key component of the point diffraction interferometer (PDI). The reasonable improvement and simulation of this device would enhance the application of point diffraction interferometry technology during the measurement of wavefronts. The traditional point diffraction interferometry measurement method is easily disturbed by environmental noise, making it difficult to obtain high-precision dynamic measurements. This paper introduces a four-step phase-shift PDI that can be employed in a common optical path. By using the principle of the finite-difference time-domain method (FDTD), a simulation model of the orthogonal polarization point diffraction pinhole plate (OP-PDPP) structure is established. The results show that when Cr is used as the film material in the pinhole plate, the parameters include a film thickness of 150 nm, a pinhole diameter of 2 μm, a wire grid period of 150 nm, and a wire grid width of 100 nm; in addition, the comprehensive extinction ratio of the pinhole plate is the greatest and the diffraction wavefront error is the smallest. Finally, the constructed experimental system is used to test the wavefront of a flat sample with a 25.4 mm aperture, and the test results are compared with those of the ZYGO interferometer. The difference in the peak-to-valley (PV) value between the OP-PDI and the ZYGO interferometer measurement is 0.0028λ, with an RMS value difference of 0.0011λ; this verifies the feasibility of the scheme proposed in this paper. The experimental results show that the proposed OP-PDPP is an effective tool for high-precision dynamic measurement.

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Section: Introductionmentioning

confidence: 99%

Design and Analysis of Orthogonal Polarization Point Diffraction Pinhole Plate

Han,

Feng,

Zhang

et al. 2024

Photonics

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Analysis of the diffraction wave from pinhole in point diffraction interferometer

Zhang

Xing

2012

SPIE Proceedings

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Reference wave source based on silicon nitride waveguide in point diffraction interferometer

et al. 2020

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Reference wave source (RWS) is the key component of the point diffraction interferometer, which determines the quality of the reference wave. The silicon nitride waveguide RWS is proposed to efficiently overcome the drawbacks of the existing RWSs, aimed at providing a spherical reference wave with high numerical aperture (NA) and high accuracy. The waveguide RWS consists of the straight waveguide, the bend waveguide, and the Y-branch edge coupler. The straight waveguide determines the accuracy and the NA of the reference wave, whereas the latter two determine the light transmittance of the RWS. Simulation results show that the peak-to-valley (PV) and the rms of the deviation from an ideal spherical wave are 2 . 86 × 10 − 4 λ ( λ = 532 n m ) and 4 . 83 × 10 − 5 λ , respectively, and the maximum light transmittance could reach 24%. Experiment results show that the NA of the reference wave reaches up to 0.58, its spot has a good circular symmetry, and its intensity has Gaussian distribution. Although the light transmittance is only 0.2%, it is expected to improve with the development of experimental conditions and waveguide fabrication technology.

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Wave-Front Quality Analysis of Three-Dimension Pinhole Vector Diffractional in Extreme Ultraviolet Region

Cited by 3 publications

References 0 publications

Design and Analysis of Orthogonal Polarization Point Diffraction Pinhole Plate

Design and Analysis of Orthogonal Polarization Point Diffraction Pinhole Plate

Analysis of the diffraction wave from pinhole in point diffraction interferometer

Reference wave source based on silicon nitride waveguide in point diffraction interferometer

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