Springer Handbook of Lasers and Optics 2012
DOI: 10.1007/978-3-642-19409-2_3
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Wave Optics

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Cited by 2 publications
(2 citation statements)
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“…The characteristics of a depth profile of a silicon layer are well described in the literature. 5,12 Usually, when covered with a planar polymer layer, a broadened Si signal is expected. 13 However, the signal intensity of the silicon substrate covered with a sphere is significantly decreased and has two broadened peaks.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The characteristics of a depth profile of a silicon layer are well described in the literature. 5,12 Usually, when covered with a planar polymer layer, a broadened Si signal is expected. 13 However, the signal intensity of the silicon substrate covered with a sphere is significantly decreased and has two broadened peaks.…”
Section: Methodsmentioning
confidence: 99%
“…For objectives with an NA > 0.8, the diffraction effect can be neglected. 12 Furthermore, the deeper the position of the nominal focus and the higher the NA, the lower the collection signal.…”
Section: Introductionmentioning
confidence: 99%