Surface Enhanced Raman Spectroscopy (SERS) is a well-established technique for en-hancing Raman signals. [1][2][3][4][5][6][7][8][9][10][11][12] Recently photonic integrated circuits have been used, as an alternative to microscopy based excitation and collection, to probe SERS signals from external metallic nanoparticles. [13][14][15] However, in order to develop quantitative on-chip SERS sensors, integration of dedicated nanoplasmonic antennas and waveguides [16][17][18][19][20][21][22] is desirable.Here we bridge this gap by demonstrating for the first time the generation of SERS signals from integrated bowtie nanoantennas, excited and collected by a single mode waveguide, and rigorously quantify the enhancement process. The guided Raman power generated by a 4-Nitrothiophenol coated bowtie antenna shows an 8 × 10 6 enhancement compared to the free-space Raman scattering. An excellent correspondence is obtained between the theoretically predicted and observed absolute Raman power. This work paves the way towards fully integrated lab-on-a-chip systems where the single mode SERS-probe can be combined with other photonic, fluidic or biological functionalities.A schematic of the device under study is shown in Figure 1(a). The fundamental TE-mode of a silicon nitride (SiN) rib waveguide excites a periodic array of gold bowtie antennas coated with a 4-Nitrothiophenol (NTP) monolayer. The pump wavelength for all experiments is set to λ P = 785 nm and NTP Stokes light (at λ S ) is subsequently collected back into the same waveguide mode.Fabrication details can be found in the Methods section and a description of the measurement setup is outlined in the Supplementary Information S1. A scanning electron microscope image of the functionalized waveguide, with cross-sectional area of 220 × 700 nm 2 , is depicted in Figure 1(b). Raman spectra of an uncoated and coated waveguide functionalized with 40 antennas are shown in Figure 1(c). The spectral regions where an NTP Stokes peak is expected (1,080, 1,110, 1,340 and 1,575 cm −1 ) 23 are highlighted by the cyan shaded areas. Before coating no NTP peaks can be distinguished from the inherent SiN background. The peaks at 1,250 and 1,518 cm −1 (marked by the black dashed lines) are attributed to interference effects of the Au array which act on the scattered background light, and they are also observed on the extinction curves of the functionalized waveguides (see Supporting Information S2). Hence they do not represent specific 2 Raman lines. After coating, four additional peaks appear and coincide with the expected NTP Stokes peaks. This demonstrates that SERS signals from single monolayer coated antennas can be efficiently excited and collected by the same fundamental waveguide mode.Subsequently the dependence of the SERS signal on the position of the plasmon resonance was investigated to verify that it can be attributed to a resonance effect and not to coincidental surface roughness. To this end, waveguides functionalized with a fixed number of antennas but varying bowtie g...