Advances in Spectroscopy for Lasers and Sensing 2006
DOI: 10.1007/1-4020-4789-4_18
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Waveguide fabrication methods in dielectric solids

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“…While processes such as laser ablation, ion beam implantation and reactive ion etching or wet chemical etching are limited to surface or near-surface structures, generation of waveguides buried deeply in the bulk of these substrates was demonstrated by means of proton implantation and femtosecond laser-based refractive index modification [31,32]. Since buried structures generally promise superior performance due to decreased waveguide asymmetry and, due to the lack of surface interaction, reduced scattering effects, femtosecond laser-based fabrication methods are expected to pave the way towards 3D optical integrated circuits [33]. Bérubé et al recently demonstrated the first waveguide, buried within a bulk and undoped sapphire substrate, exhibiting single-mode operation at a wavelength of 2850 nm by generating a depressed cladding structure around the waveguide's core via femtosecond laser-based refractive index modification of the material [34].…”
Section: Introductionmentioning
confidence: 99%
“…While processes such as laser ablation, ion beam implantation and reactive ion etching or wet chemical etching are limited to surface or near-surface structures, generation of waveguides buried deeply in the bulk of these substrates was demonstrated by means of proton implantation and femtosecond laser-based refractive index modification [31,32]. Since buried structures generally promise superior performance due to decreased waveguide asymmetry and, due to the lack of surface interaction, reduced scattering effects, femtosecond laser-based fabrication methods are expected to pave the way towards 3D optical integrated circuits [33]. Bérubé et al recently demonstrated the first waveguide, buried within a bulk and undoped sapphire substrate, exhibiting single-mode operation at a wavelength of 2850 nm by generating a depressed cladding structure around the waveguide's core via femtosecond laser-based refractive index modification of the material [34].…”
Section: Introductionmentioning
confidence: 99%