Wavelength dependence of gain from 248.2 to 248.4 nm in a KrF discharge laser

Abstract

The small signal gain and saturation intensity of a KrF discharge laser module have been measured in the peak gain region of 248.22 to 248.40 nm. The gain has also been measured for the frequency-doubled argon-ion laser line at 248.25 nm and found to be equal to the peak KrF gain of 0.143+or-0.002 cm-1 to within the experimental accuracy. The best-fit saturation intensity for this wavelength region was found to be 2.3+or-0.3 MW cm-2.