2024
DOI: 10.1364/ao.542148
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Wavelength optimization of fine optical surface defect detection based on FDTD

Shaowen Wang,
Wu Lan,
Shiling Wang
et al.

Abstract: Due to the similar order of magnitude of the defect size and the detection wavelength, when detecting micro-/nano-scale defects on the surface of a fine optical component, the intense modulation of the optical field poses challenges in correlating imaging widths of defects with actual widths. A dark-field scattering imaging (DFSI) model, based on the finite difference time domain (FDTD) method, is established to study the imaging for triangular and circular section defects and investigate the influence of wave… Show more

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