Wavelength-selective addressing of visible and near-infrared plasmon resonances for SU8 nanolithography

Abstract

We imprint plasmonic near field enhancements as nanoscale topography in SU8 photoresist using two-photon absorption from a spectrally filtered broadband supercontinuum light source. Imprinted patterns smaller than 50 nm across are obtained localized at positions of high local field enhancements in gold bow tie antennas, and gold split rings resonant in the visible and near-infrared. Enhanced exposure only occurs at wavelengths and polarizations that exactly match the plasmonic resonances. Hence our work demonstrates that wavelength selective addressing of hot spots for nanolithography using an inexpensive, low peak-power picosecond pulsed source is freely tunable throughout the visible and infrared to match any desired plasmon resonance.

Backaction in metasurface etalons

“…The bare split ring resonance (no mirror, split ring embedded in the dielectric) is at around ω = 1.5 × 10 15 s −1 (1250 nm), which is consistent with reports by de Hoogh et al in Ref. 41. For the dilute lattice we retrieve a high overall reflectivity, with a set of very deep minima around the single particle resonance.…”

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“…However, the realization of a metamaterial is increasingly difficult towards shorter wavelength operation. To date10111213, the smallest fabricated SRR has the size of ~ 100 nm, exhibiting distinct magnetic resonance at infrared wavelength. For achieving magnetic resonance in visible spectrum (400 nm < λ < 800 nm), one can estimate that the size of SRRs should be smaller than 100 nm, indicating the need of a large scale sub-30-nm patterning capability.…”

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“…3.14. The first concerns the well-known 'bowtie' antenna [38], that consists of two triangular metal particles in a bowtie arrangement, with a narrow gap in between them. Bowtie antennas combine the electromagnetic properties of sharp metal tips with those of coupled plasmon resonant NP pairs [30].…”