Wedge etching by anodic oxidation and determination of shallow boron profile by ion beam analysis

Gyulai, J.; Battistig, G.; Lohner, T.; Hajnal, Z.

doi:10.1016/j.nimb.2007.12.112

Nuclear Instruments and Methods in Physics Research Section B:

2008

DOI: 10.1016/j.nimb.2007.12.112

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Wedge etching by anodic oxidation and determination of shallow boron profile by ion beam analysis

J. Gyulai

G. Battistig

T. Lohner

et al.

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Wedge etching by anodic oxidation and determination of shallow boron profile by ion beam analysis

Cited by 1 publication

References 10 publications

Ellipsometry of Semiconductor Nanocrystals

Ellipsometry of Semiconductor Nanocrystals

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