Weight loss of alumina and zirconia targets during PLD

Aden, Mirko; Kreutz, E. W.; Voss, A.

doi:10.1088/0022-3727/28/12/030

Cited by 3 publications

(5 citation statements)

References 15 publications

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“…This hypothesis is less realistic than those used in the model based on evaporation without equilibrium [4], which may be applied to evaporation in the presence of a gas at atmospheric pressure (e.g. [5]). The second phase, i.e.…”

Section: Introductionmentioning

confidence: 99%

Experimental and theoretical study of the expansion of a metallic vapour plasma produced by laser

Gomes¹,

Aubreton²,

Gonzalez³

et al. 2004

J. Phys. D: Appl. Phys.

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The interaction between a metallic plasma produced by laser ablation and an ambient gas (argon, air and nitrogen) at atmospheric pressure is studied. The experimental results are compared with theoretical ones given by numerical simulation. Aluminium and copper targets are used. The uniform repartition of iron impurities included in the target (1.6% for Al and 2% for Cu) is warranted by the manufacturer. The Nd : YAG laser delivers pulses of 8 ns FWHM duration with an energy ranging from 70 to 100 mJ at a rate of 10 Hz. The temperature measurements have been performed by the Boltzmann diagram method using iron lines. The influence of ambient gas and target material is studied. After an Abel transform, we observe a maximum of the line intensities off the plasma axis. This shows the formation of gas plasma around the metallic one before complete diffusion of the ambient gas in the metallic plasma. The hydrodynamic model built in one dimension uses the continuity equations. This code is based on the control volume method of Patankar. A temperature and mass fraction profiles are needed as initial conditions. This model is able to describe the temporal evolution of the temperature and of the diffusion in the plasma. It allows us to study the mixture of the metallic plasma and the ambient gas as soon as the plasma is thermalized and local thermodynamic equilibrium is established. There is good agreement between the results of the simulation and the experimental results.

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Section: Introductionmentioning

confidence: 99%

Experimental and theoretical study of the expansion of a metallic vapour plasma produced by laser

Gomes¹,

Aubreton²,

Gonzalez³

et al. 2004

J. Phys. D: Appl. Phys.

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“…The LIV model describes the heating of the irradiated target, the laser induced phase transition, namely vaporization, and the generation and dynamics of the plasma state in a two-fluid approximation including the propagation of the laser radiation. The previous state of the model (Aden et al 1993(Aden et al , 1995 is changed. First, the heat conduction equation is solved by the use of the Green function to obtain a more realistic temperature distribution of the irradiated target, especially when the optical penetration depth of the laser radiation is smaller than the thermal one.…”

Section: Appendix a The Sedov-taylor Scaling Factormentioning

confidence: 99%

“…The generation and dynamics of the plasma state are described according to Aden et al (1993) by the use of continuum mechanical equations without dissipation in a two-fluid model (electrons and heavy particles). In addition to the mechanism of absorption of laser radiation by inverse Bremsstrahlung also photo-ionization is incorporated, influencing the energy equation as well as the degree of ionization.…”

Section: Appendix a The Sedov-taylor Scaling Factormentioning

confidence: 99%

“…The production of holes with a high aspect ratio in copper films due to removal of material by excimer laser irradiation is a topic of current research activity. During the removal of material by pulsed laser irradiation local vaporization of the irradiated target usually takes place, initiating a discontinuous change of state in the processing gases, such as air (Maher and Hall 1973, Grun et al 1991, Aden et al 1993, Callies et al 1995. It is driven by the pressure gradients of the plasma, which consists of the species of the removed material and the ambient air.…”

Section: Introductionmentioning

confidence: 99%

“…The assumptions for the validity of this relation are that the energy is released in a manner similar to an instantaneous, massless point explosion (that is, the pulse duration is shorter than t) and the diameter of the spot area of the laser radiation is smaller than D. Besides this simple relation one might use a model of the laser-induced vaporization (LIV) process (Aden et al 1993). It incorporates the laser-induced phase transition (vaporization), the plasma dynamics and the propagation of the laser radiation in mutual interaction.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

The applicability of the Sedov - Taylor scaling during material removal of metals and oxide layers with pulsed and excimer laser radiation

Aden

Kreutz

Schlüter

et al. 1997

J. Phys. D: Appl. Phys.

Self Cite

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For the removal of material with pulsed laser radiation the distance travelled by the shock or blast wave and the amount of energy released in the plasma state due to the absorption of laser radiation are determined experimentally and theoretically. The distance travelled by the blast wave is detected by schlieren photography, the released energy by monitoring the transmitted laser radiation during the removal process. The theoretical evaluation is performed by numerical simulation using a model incorporating the laser-induced vaporization process and the dynamics of the plasma state. The results obtained from the experiments and the model are compared with that of the Sedov - Taylor scaling. The removal of the oxide layer from austenitic steel is investigated with laser radiation produced by a TEA and a high-power laser device. For the TEA laser with fluences of 5 and 10 J 50 - 80% of the pulse energy is released into the plasma state and the Sedov - Taylor scaling describes the distance travelled by the blast wave in agreement with data from the experiments and the simulation. For the high-power laser with a fluence of 50 J , 6% of the pulse energy is released into the plasma state and the Sedov - Taylor scaling does not describe the data of the simulation. The process of removal of copper and aluminium material is simulated for excimer laser radiation with fluences of 15 and 30 J . For copper 15 - 30% of the pulse energy is released into the plasma state and the Sedov - Taylor scaling is applicable. For aluminium, less than 2% of the pulse energy is released into the plasma state and the Sedov - Taylor scaling is only applicable for the higher fluence.

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Dynamics in Pulsed Laser Deposition of Ceramics: Experimental, Theoretical and Numerical Studies

Kreutz

Gottmann

1998

phys. stat. sol. (a)

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The dynamics in energy coupling, material removal, material transfer, and film growth are studied experimentally, theoretically and numerically for pulsed laser deposition of ceramics. Excimer laser radiation is investigated as a function of laser parameters (fluence, repetition rate, beam geometry) and processing variables (pressure and composition of processing gas, target–substrate arrangement) in order to deposit thin ceramic (Al2O3, ZrO2, BaTiO3, PZT) films on Si and SrTiO3 substrates including buffer layers. The laser parameters and processing variables achieve different vapor and/or plasma states represented in the type, number, momentum and energy of the ensembles of species generated, which are used to deposit thin films with defined properties in view of electronic and optical applications.

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Weight loss of alumina and zirconia targets during PLD

Cited by 3 publications

References 15 publications

Experimental and theoretical study of the expansion of a metallic vapour plasma produced by laser

Experimental and theoretical study of the expansion of a metallic vapour plasma produced by laser

The applicability of the Sedov - Taylor scaling during material removal of metals and oxide layers with pulsed and excimer laser radiation

Dynamics in Pulsed Laser Deposition of Ceramics: Experimental, Theoretical and Numerical Studies

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