Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array

Cao, Xiaoyuan; Lu, Yongju; Fan, Hua; Xia, Hong; Zhang, Lei; Zhang, Yong‐Lai

doi:10.1364/ao.57.009604

Cited by 30 publications

(16 citation statements)

References 18 publications

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“…It is reasonable to determine that the cross-sectional profile is a parabola. The focal length of the convex microlens can be calculated as (Equation (1)) [48,49]:…”

Section: Resultsmentioning

confidence: 99%

“…It is reasonable to determine that the cross-sectional profile is a parabola. The focal length of the convex microlens can be calculated as (Equation (1)) [ 48 , 49 ]:

where h is the sag height of the microlens, n is the refractive index of ChG, and r is the aperture radius of the microlens. Given h = 8.008 μm, r = 28.75 μm, and n = 2.58, we have f = 35.2 μm.…”

Section: Resultsmentioning

confidence: 99%

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Fabrication of Chalcogenide Glass Based Hexagonal Gapless Microlens Arrays via Combining Femtosecond Laser Assist Chemical Etching and Precision Glass Molding Processes

et al. 2020

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Chalcogenide glasses (ChGs) are emerging as critical infrared (IR)-enabled materials in advanced IR optical systems by the wealth of their transparency in the key wide infrared (IR) transmission window. However, fabrication of ChG-based integrated micro-optical components in an efficient and economical way remains a huge challenge. In this paper, a 3D close-packed hexagonal microlens array (MLA) possessing over 6000 convex hexagonal micro-lenslets with the size of tens of micrometers within a footprint of 10 mm × 10 mm on a Ge20Sb15Se65 ChG surface was successfully fabricated via a precise thermal-mechanical molding process. The master mold of ChG MLA was firstly fabricated by a femtosecond laser-assisted chemical etching process and then transferred on to the surface of the ChG via a precision thermo-mechanical molding process, which resulted in a convex MLA. The morphology, imaging and focusing performances of the as-prepared ChG MLA were investigated and demonstrated the advancement of the method. Meanwhile, the IR transmittance and x-ray diffraction image of the ChG MLAs were measured to verify the structural and compositional stability of the ChG under the given molding conditions. The combined results proved a new route to mass production of miniaturized gapless ChG MLAs for advanced infrared micro-optics.

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“…It is reasonable to determine that the cross-sectional profile is a parabola. The focal length of the convex microlens can be calculated as (Equation (1)) [48,49]:…”

Section: Resultsmentioning

confidence: 99%

“…It is reasonable to determine that the cross-sectional profile is a parabola. The focal length of the convex microlens can be calculated as (Equation (1)) [ 48 , 49 ]:

Section: Resultsmentioning

confidence: 99%

Fabrication of Chalcogenide Glass Based Hexagonal Gapless Microlens Arrays via Combining Femtosecond Laser Assist Chemical Etching and Precision Glass Molding Processes

et al. 2020

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“…Micromachines 2021, 12, x 2 of 7 dielectrics [21]. Earlier reports have already proven the effectiveness of the femtosecond laser ablation and etching technologies for fabricating optical devices [22][23][24]. However, the etching process involved in this technology still takes a lot of time.…”

Section: Methodsmentioning

confidence: 99%

“…As an appealing alternative, femtosecond laser manufacturing has become a powerful tool for processing optical devices based on a wide range of materials, including semiconductors [19], metals [20], and dielectrics [21]. Earlier reports have already proven the effectiveness of the femtosecond Micromachines 2021, 12, 458 2 of 7 laser ablation and etching technologies for fabricating optical devices [22][23][24]. However, the etching process involved in this technology still takes a lot of time.…”

Section: Introductionmentioning

confidence: 99%

Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe

et al. 2021

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A rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high transparency at wavelengths between approximately 0.76–20 μm were fabricated within 36 min. More importantly, the size of the microlenses can be controlled by adjusting the laser power. Their high-quality infrared optical performance was also demonstrated. This method holds great promise for the development of ZnSe-based micro-optical devices.

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“…Realizing high precision micro/nano processing of sapphire is necessary for applications in integrated micro/nano-optics. Due to the dependence of etching rate with crystal orientation, wet-etching-assisted femtosecond laser modification is not suitable for flexible fabrication of high quality smooth curved micro optical elements 99 . Liu et al 100 demonstrated the controllable fabrication of sapphire concave microlens by dry-etching-assisted femtosecond laser modification.…”

Section: Dry-etching-assisted Femtosecond Laser Modificationmentioning

confidence: 99%

Etching-assisted femtosecond laser modification of hard materials

Liu

Bai

Chen

et al. 2019

Opto-Electronic Advances

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With high hardness, high thermal and chemical stability and excellent optical performance, hard materials exhibit great potential applications in various fields, especially in harsh conditions. Femtosecond laser ablation has the capability to fabricate three-dimensional micro/nanostructures in hard materials. However, the low efficiency, low precision and high surface roughness are the main stumbling blocks for femtosecond laser processing of hard materials. So far, etching-assisted femtosecond laser modification has demonstrated to be the efficient strategy to solve the above problems when processing hard materials, including wet etching and dry etching. In this review, femtosecond laser modification that would influence the etching selectivity is introduced. The fundamental and recent applications of the two kinds of etching assisted femtosecond laser modification technologies are summarized. In addition, the challenges and application prospects of these technologies are discussed.

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Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array

Cited by 30 publications

References 18 publications

Fabrication of Chalcogenide Glass Based Hexagonal Gapless Microlens Arrays via Combining Femtosecond Laser Assist Chemical Etching and Precision Glass Molding Processes

Fabrication of Chalcogenide Glass Based Hexagonal Gapless Microlens Arrays via Combining Femtosecond Laser Assist Chemical Etching and Precision Glass Molding Processes

Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe

Etching-assisted femtosecond laser modification of hard materials

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