Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask

Koyuncuoğlu, Aziz; Akçakaya, Dilek Işık; Sukas, Özlem Sardan; Külah, Haluk

doi:10.1016/j.mne.2022.100153

Cited by 3 publications

(2 citation statements)

References 16 publications

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“…While patterning 100 nm Pt layer, fast and improved aqua regia etching developed by the group was used. [ 36 ] Then, 20 nm Ti layer was patterned by wet etching. A 1 µm Parylene‐C layer was deposited by evaporation (SCS‐ PDS 2010 System) as a vertical isolation layer.…”

Section: Design and Experimental Sectionmentioning

confidence: 99%

Piezoelectric Multi‐Channel Bilayer Transducer for Sensing and Filtering Ossicular Vibration

Yüksel,

Atik,

Külah

2024

Advanced Science

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This paper presents an acoustic transducer for fully implantable cochlear implants (FICIs), which can be implanted on the hearing chain to detect and filter the ambient sound in eight frequency bands between 250 and 6000 Hz. The transducer dimensions are conventional surgery compatible. The structure is formed with 3 × 3 × 0.36 mm active space for each layer and 5.2 mg total active mass excluding packaging. Characterization of the transducer is carried on an artificial membrane whose vibration characteristic is similar to the umbo vibration. On the artificial membrane, piezoelectric transducer generates up to 320.3 mVpp under 100 dB sound pressure level (SPL) excitation and covers the audible acoustic frequency. The measured signal‐to‐noise‐ratio (SNR) of the channels is up to 84.2 dB. Sound quality of the transducer for fully implantable cochlear implant application is graded with an objective qualification method (PESQ) for the first time in the literature to the best of the knowledge, and scored 3.42/4.5.

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Section: Design and Experimental Sectionmentioning

confidence: 99%

Piezoelectric Multi‐Channel Bilayer Transducer for Sensing and Filtering Ossicular Vibration

Yüksel,

Atik,

Külah

2024

Advanced Science

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“…It is employed when precise tolerances and intricate patterns are required on metal parts. The photoresist masking method can also be applied in chemical blanking and chemical engraving [38].…”

Section: Photochemical Machiningmentioning

confidence: 99%

Non-Traditional Machining Techniques in Manufacturing Industries – An Overview

Ikumapayi,

Omietimi,

Onu

et al. 2023

E3S Web Conf.

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This comprehensive study provides an in-depth analysis of non-traditional machining techniques in the manufacturing industry. Focusing on mechanical, electrochemical, chemical, and thermal machining processes, the research explores recent advancements and their implications. The study adopts the action research method to gain a deeper understanding of the challenges associated with these techniques. Through a thorough examination of the machining processes, this work delves into various concepts, including the operations involved in each process and their corresponding outcomes. The analysis sheds light on the significance of non-traditional machining in the manufacturing industry, highlighting its potential for producing complex components and meeting design requirements that traditional machining methods may struggle to achieve. By exploring recent developments in non-traditional machining, this study aims to provide an overview of the advancements made in this field. It emphasizes the importance of understanding these techniques to unlock their full potential and enhance manufacturing capabilities. The findings of this research contribute to the existing knowledge base and serve as a valuable resource for professionals and researchers in the field of non-traditional machining.

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A full-custom fully implantable cochlear implant system validated in vivo with an animal model

Uluşan,

Yüksel,

Topçu

et al. 2024

Commun Eng

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Realizations of fully implantable cochlear implants (FICIs) for providing adequate solution to esthetic concerns and frequent battery replacement have lacked of addressing system level criteria as a complete device. Here, we present a full-custom FICI that considers design of both an implantable sensor for wide range sound sensing and a signal conditioning circuit for electrical stimulation of the auditory nerve. The microelectromechanical system (MEMS)-based acoustic sensor utilizes multiple cantilever beam structures to sense and filter the mechanical vibrations on the ossicular chain. The area optimized bilayer design of the piezoelectric sensor met with the volume limitation in the middle ear while achieving high signal-to-noise-ratio. The sensor outputs are processed by a current mode low-power signal conditioning circuit that stimulates the auditory neurons through intracochlear electrodes. The FICI is validated with an in vivo model where the electrical auditory brainstem response (eABR) of the animal was observed while applying sound excitation. The eABR results demonstrate that the system is able to evoke responses in the auditory nerves of a guinea pig for sound range of 45–100 dB SPL within the selected frequency bands.

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Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask

Cited by 3 publications

References 16 publications

Piezoelectric Multi‐Channel Bilayer Transducer for Sensing and Filtering Ossicular Vibration

Piezoelectric Multi‐Channel Bilayer Transducer for Sensing and Filtering Ossicular Vibration

Non-Traditional Machining Techniques in Manufacturing Industries – An Overview

A full-custom fully implantable cochlear implant system validated in vivo with an animal model

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